Dan Nelson
at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 March 2020
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Image segmentation, Interfaces, Image resolution, Scanning electron microscopy, Transmission electron microscopy, Image filtering, Machine learning, Cadmium sulfide, Scanning transmission electron microscopy

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Image segmentation, Interfaces, Silicon, Image quality, 3D metrology, Process control, Image enhancement, Photomicroscopy, 3D image processing

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