Prof. Daniel E. Adams
at JILA
SPIE Involvement:
Author
Publications (12)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Thin films, Nanostructures, Diffraction, Coherence imaging, Nanostructuring, Nickel, Silicon, Wave propagation, Extreme ultraviolet, Acoustics

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Coherence imaging, Cameras, Stereoscopy, Silicon, Reflectivity, Reflectometry, Profiling, 3D metrology, Extreme ultraviolet, 3D image processing

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Coherence imaging, Metrology, Imaging systems, Reflectivity, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Microscopes, Diffraction, Mirrors, Detection and tracking algorithms, Sensors, Image resolution, Image transmission, Extreme ultraviolet, Reconstruction algorithms, Spatial resolution

PROCEEDINGS ARTICLE | September 30, 2016
Proc. SPIE. 9948, Novel Optical Systems Design and Optimization XIX
KEYWORDS: Microscopes, Diffraction, Coherence imaging, Imaging systems, Sensors, X-rays, Image resolution, Data acquisition, Extreme ultraviolet, X-ray imaging

PROCEEDINGS ARTICLE | April 21, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Coherence imaging, Metrology, Polarization, Spatial filters, Spectroscopy, Wave propagation, Deconvolution, Reconstruction algorithms, Laser beam diagnostics, Diffraction gratings

Showing 5 of 12 publications
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