Dr. Daniel Bratton
at Cornell Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Electron beam lithography, FT-IR spectroscopy, Magnesium, Glasses, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Semiconducting wafers

Proceedings Article | 4 May 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Electron beam lithography, Polymers, Glasses, Molecules, Silicon, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Chemical elements

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