Dr. Daniel A. Freedman
Dean at State Univ of New York at New Paltz
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Switches, Light emitting diodes, Carbon dioxide, Imaging systems, Metals, Photons, Platinum, Cobalt, Photoresist materials, Extreme ultraviolet, Palladium, Extreme ultraviolet lithography, Photochemistry, Photoresist developing

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Carbon dioxide, Iron, Metals, Photons, Electrons, Photoresist materials, Microelectronics, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Carbon monoxide, Absorption

SPIE Journal Paper | December 24, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Palladium, Platinum, Magnesium, Extreme ultraviolet, Solids, Metals, Lithography, Extreme ultraviolet lithography, Carbon monoxide, Carbonates

SPIE Journal Paper | November 9, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Tin, Line edge roughness, Photoresist materials, Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Edge roughness, Crystals, Optical filters

SPIE Journal Paper | October 14, 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Antimony, Polymers, Molecules, Chromium, Extreme ultraviolet, Polymerization, Lithography, Bromine, Scanning electron microscopy, Metals

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Polymers, Metals, Molecules, Scanning electron microscopy, Polymerization, Extreme ultraviolet, Bismuth, Antimony, Tin

Showing 5 of 11 publications
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