Dr. Daniel A. Freedman
Dean at State Univ of New York at New Paltz
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 19 December 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Extreme ultraviolet, Cobalt, Extreme ultraviolet lithography, Chromium, Metals, Photolysis, Solids, Iron, Electrons, Carbon monoxide

Proceedings Article | 31 March 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Switches, Light emitting diodes, Carbon dioxide, Imaging systems, Metals, Photons, Platinum, Cobalt, Photoresist materials, Extreme ultraviolet, Palladium, Extreme ultraviolet lithography, Photochemistry, Photoresist developing

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Carbon dioxide, Iron, Metals, Photons, Electrons, Photoresist materials, Microelectronics, Extreme ultraviolet, Absorbance, Extreme ultraviolet lithography, Carbon monoxide, Absorption

SPIE Journal Paper | 24 December 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Palladium, Platinum, Magnesium, Extreme ultraviolet, Solids, Metals, Lithography, Extreme ultraviolet lithography, Carbon monoxide, Carbonates

SPIE Journal Paper | 9 November 2015
JM3 Vol. 14 Issue 04
KEYWORDS: Tin, Line edge roughness, Photoresist materials, Optical lithography, Extreme ultraviolet lithography, Extreme ultraviolet, Lithography, Edge roughness, Crystals, Optical filters

Showing 5 of 12 publications
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