CONFERENCE PROCEEDINGS
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Dr. Daniel Hausermann
at Argonne National Lab
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Author
Publications (1)
PROCEEDINGS ARTICLE | January 13, 2004
Proc. SPIE. 5193, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
KEYWORDS: Mirrors, X-ray optics, Polishing, Ferroelectric materials, Metrology, Electrodes, X-rays, Wavefronts, Adaptive optics, Spherical lenses
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