Dr. Daniel J. C. Herr
Professor and Department Chair at Univ of North Carolina at Greensboro
SPIE Involvement:
Fellow status | Conference Program Committee | Conference Chair | Author
Publications (8)

SPIE Conference Volume | April 1, 2011

SPIE Conference Volume | March 10, 2010

PROCEEDINGS ARTICLE | April 6, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Nanostructures, Optical lithography, Manufacturing, Photoresist materials, Nanomaterials, Photomasks, Directed self assembly, Nanofabrication, Nanolithography

PROCEEDINGS ARTICLE | May 21, 1996
Proc. SPIE. 2725, Metrology, Inspection, and Process Control for Microlithography X
KEYWORDS: Semiconductors, Safety, Manufacturing, Raw materials, Semiconductor manufacturing, Analytical research, Research management, Sustainable technology, Visibility

Showing 5 of 8 publications
Conference Committee Involvement (38)
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXII
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXI
27 February 2017 | San Jose, California, United States
Alternative Lithographic Technologies VIII
22 February 2016 | San Jose, California, United States
Showing 5 of 38 published special sections
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top