Dr. Daniel J. C. Herr
Professor - Nanoscience at Univ of North Carolina at Greensboro
SPIE Involvement:
Conference Program Committee | Author
Publications (10)

Proceedings Article | 23 March 2020
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Semiconductors, Data storage, Interfaces, Computing systems, Biology, Biotechnology, Data processing, Nanolithography, Single sideband modulation, Nanowires

Proceedings Article | 5 June 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Oxides, Optical lithography, Metals, Molecules, Copper, Ions, Transmission electron microscopy, Head, Nanomaterials, Molecular self-assembly

SPIE Conference Volume | 1 April 2011

SPIE Conference Volume | 10 March 2010

Proceedings Article | 6 April 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Nanostructures, Optical lithography, Manufacturing, Photoresist materials, Nanomaterials, Photomasks, Directed self assembly, Nanofabrication, Nanolithography

Showing 5 of 10 publications
Conference Committee Involvement (40)
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2021
21 February 2021 | San Jose, California, United States
Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
24 February 2020 | San Jose, California, United States
Novel Patterning Technologies 2018
26 February 2018 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XXXII
26 February 2018 | San Jose, California, United States
Emerging Patterning Technologies 2017
27 February 2017 | San Jose, California, United States
Showing 5 of 40 Conference Committees
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