This paper describes the implementation of several key components that were used to build a prototype for a
versatile camera system operating in a scanning electron microscope. For the precise alignment of the camera
inside the vacuum chamber, a stick-slip-based actuator was developed, that can create a high torque while having
small dimensions. The camera is mounted on a rail and carriage system and the implemented combination of
absolute and relative optical sensors is described. Finally, several object tracking scenarios are defined and first
results of implemented tracking algorithms are given.
This paper presents a nanohandling robot cell with flexible visual feedback designed to work inside an SEM's vacuum
chamber in order to support teleoperated and fully automated nanohandling. Rail-based robots position miniature video
microscopes that observe the handling from different angles and with different magnifications. Image processing
techniques can be used to recognize and track objects and three-dimensional information can be obtained by stereo
vision and by the microscope's focus. The feasibility and advantages of the CameraMan concept are analyzed by the
implementation of a robot cell prototype. A self-learning controller is used to control the non-linear parts of the system,
challenges for cooperatively controlling the multi-robot system are outlined and high-level automation is discussed.