Mr. Daniel H. Malueg
at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 20, 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, X-rays, Silicon, Wavefronts, Photoresist materials, Photomasks, Silicon carbide, Semiconducting wafers, Beam propagation method, Phase shifts

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