Daniel H. Malueg
at Univ of Wisconsin-Madison
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 May 2004
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, X-rays, Silicon, Wavefronts, Photoresist materials, Photomasks, Silicon carbide, Semiconducting wafers, Beam propagation method, Phase shifts

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