Daniel Orquiza de Carvalho
at Escola Politecnica da Univ de São Paulo
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8257, Optical Components and Materials IX
KEYWORDS: Optical components, Refractive index, Gas sensors, Optical sensors, Waveguides, Sensors, Polymers, Water, Silicon, Humidity

PROCEEDINGS ARTICLE | March 15, 2011
Proc. SPIE. 7940, Oxide-based Materials and Devices II
KEYWORDS: Refractive index, Waveguides, Cladding, Etching, Silicon, Chromium, CCD cameras, Wave propagation, Reactive ion etching, Isotropic etching

PROCEEDINGS ARTICLE | February 26, 2010
Proc. SPIE. 7598, Optical Components and Materials VII
KEYWORDS: Thin films, Ellipsometry, Refractive index, FT-IR spectroscopy, Waveguides, Cladding, Sputter deposition, Silicon, Nitrogen, Aluminum nitride

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7590, Micromachining and Microfabrication Process Technology XV
KEYWORDS: Oxides, Light sources, Silica, Etching, Metals, Silicon, Resistance, Chromium, Photoresist materials, Silicon films

PROCEEDINGS ARTICLE | February 19, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Light sources, Optical lithography, Waveguides, Cladding, Sensors, Silicon, Resistance, Chromium, Plasma enhanced chemical vapor deposition, Silicon carbide

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