Mr. Daniel J. Prager Profile

Daniel J. Prager

at Tokyo Electron America Inc

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Author

Publications (2)

Proceedings Article | 24 March 2006 Paper

Integrated scatterometry in high-volume manufacturing for polysilicon gate etch control

Matthew Sendelbach, Andres Munoz, Kenneth Bandy, Dan Prager, Merritt Funk

Proceedings Volume 6152, 61520F (2006) https://doi.org/10.1117/12.659946

KEYWORDS: Semiconducting wafers, Scatterometry, Etching, Scatter measurement, Control systems, Process control, Metrology, Error analysis, Critical dimension metrology, Feedback control

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Proceedings Article | 24 May 2004 Paper

Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control

Matthew Sendelbach, Wesley Natzle, Charles Archie, Bill Banke, Dan Prager, Dan Engelhard, Jason Ferns, Asao Yamashita, Merritt Funk, Fumihiko Higuchi, Masayuki Tomoyasu

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.537969

KEYWORDS: Semiconducting wafers, Etching, Critical dimension metrology, Calibration, Metrology, Control systems, Photomasks, Silver, Error analysis, Silicon

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