Dr. Daniel J. Rader Profile

Dr. Daniel J. Rader

at Sandia National Labs

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Author

Publications (3)

Proceedings Article | 21 March 2008 Paper

Particle-contamination analysis for reticles in carrier inner pods

John Torczynski, Michael Gallis, Daniel Rader

Proceedings Volume 6921, 69213G (2008) https://doi.org/10.1117/12.768409

KEYWORDS: Particles, Reticles, Atmospheric particles, Contamination, Particle contamination, Diffusion, Solids, Astatine, Numerical simulations, Atmospheric modeling

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Proceedings Article | 1 July 2002 Paper

Verification studies of thermophoretic protection for EUV masks

Daniel Rader, Daniel Dedrick, Eric Beyer, Alvin Leung, Leonard Klebanoff

Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472288

KEYWORDS: Particles, Semiconducting wafers, Photomasks, Atmospheric particles, Pellicles, Scanners, Argon, Protactinium, Extreme ultraviolet, Extreme ultraviolet lithography

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Proceedings Article | 30 November 1999 Paper

Development of an unattended ground sensor for ultraviolet laser-induced fluorescence detection of biological agent aerosols

Kevin Schroder, Philip Hargis, Randal Schmitt, Daniel Rader, Isaac Shokair

Proceedings Volume 3855, (1999) https://doi.org/10.1117/12.371266

KEYWORDS: Ultraviolet radiation, Luminescence, Laser induced fluorescence, Sensors, Aerosols, Optical filters, Nd:YAG lasers, Biological weapons, Particles, Biological detection systems

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