Dr. Daniel Sanders
Manager at IBM Research - Almaden
SPIE Involvement:
Conference Co-Chair | Conference Program Committee | Author
Publications (29)

PROCEEDINGS ARTICLE | April 13, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Oxides, Optical lithography, Polymethylmethacrylate, Etching, Metals, Scanning electron microscopy, Extreme ultraviolet, Directed self assembly, Picosecond phenomena, Critical dimension metrology

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Metals, Silicon, Manufacturing, Extreme ultraviolet, Directed self assembly, Plasma etching, Optical alignment, Critical dimension metrology, Line edge roughness, Nanofabrication

SPIE Journal Paper | February 7, 2017
JM3 Vol. 16 Issue 01
KEYWORDS: Directed self assembly, Resolution enhancement technologies, Lithography, Metals, Optical lithography, Fin field effect transitor, Photomasks, 3D modeling, Computational lithography, Optical proximity correction

PROCEEDINGS ARTICLE | April 4, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Extreme ultraviolet, Directed self assembly, Picosecond phenomena, Critical dimension metrology, Semiconducting wafers, Global Positioning System

PROCEEDINGS ARTICLE | April 1, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Semiconductors, Lithography, Polymethylmethacrylate, Scattering, Chemistry, Atomic force microscopy, Monte Carlo methods, Surface properties, Directed self assembly, Integrated circuits, Picosecond phenomena

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Silicon, Manufacturing, Oxygen, Line width roughness, Directed self assembly, Line edge roughness, Plasma, Fin field effect transitor

Showing 5 of 29 publications
Conference Committee Involvement (10)
Advances in Patterning Materials and Processes XXXVI
24 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIII
29 February 2016 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXII
24 February 2015 | San Jose, California, United States
Showing 5 of 10 published special sections
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