Dr. Daniel P. Sanders
Manager at IBM Research - Almaden
SPIE Involvement:
Conference Co-Chair | Editor | Author
Publications (30)

Proceedings Article | 25 March 2019 Presentation
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Semiconductors, Metals, Manufacturing, Photoresist materials, Extreme ultraviolet, Semiconductor manufacturing, Extreme ultraviolet lithography, Photochemistry, Thermal modeling, Resolution enhancement technologies

Proceedings Article | 13 April 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Oxides, Optical lithography, Polymethylmethacrylate, Etching, Metals, Scanning electron microscopy, Extreme ultraviolet, Directed self assembly, Picosecond phenomena, Critical dimension metrology

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Metals, Silicon, Manufacturing, Extreme ultraviolet, Directed self assembly, Plasma etching, Optical alignment, Critical dimension metrology, Line edge roughness, Nanofabrication

SPIE Journal Paper | 7 February 2017
JM3 Vol. 16 Issue 01
KEYWORDS: Directed self assembly, Resolution enhancement technologies, Lithography, Metals, Optical lithography, Photomasks, 3D modeling, Computational lithography, Optical proximity correction

Proceedings Article | 4 April 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Etching, Extreme ultraviolet, Directed self assembly, Picosecond phenomena, Critical dimension metrology, Semiconducting wafers, Global Positioning System

Showing 5 of 30 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 14 May 2020

SPIE Conference Volume | 17 June 2019

Conference Committee Involvement (12)
Advances in Patterning Materials and Processes XXXVIII
23 February 2021 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Showing 5 of 12 Conference Committees
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