Daniel Sarlette
Technical Director Lithography at Infineon Technologies
SPIE Involvement:
Conference Program Committee | Author
Publications (6)

Proceedings Article | 12 April 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Oxides, Lithography, Etching, Ions, Atomic force microscopy, Photoresist materials, Photomasks, Reactive ion etching, Semiconducting wafers, Grayscale lithography

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Lithography, Optical lithography, Ions, Silicon, Doping, Photomasks, Ion implantation, Photoresist processing, Semiconducting wafers, Grayscale lithography

Proceedings Article | 20 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Lithography, Contamination, Etching, Metals, Particles, Dielectrics, Reliability, Dielectric filters, Semiconducting wafers, Bottom antireflective coatings

Proceedings Article | 23 March 2011 Paper
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Photovoltaics, Reticles, Scanners, Manufacturing, Photomasks, Source mask optimization, Optical proximity correction, Resolution enhancement technologies, Fiber optic illuminators

Proceedings Article | 4 March 2010 Paper
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Etching, Image processing, Scanners, Design for manufacturing, Optical proximity correction, Chemical reactions, Semiconducting wafers, 193nm lithography, Resolution enhancement technologies

Showing 5 of 6 publications
Conference Committee Involvement (7)
Optical Lithography XXXIV
23 February 2021 | San Jose, California, United States
Optical Microlithography XXXIII
25 February 2020 | San Jose, California, United States
Optical Microlithography XXXII
26 February 2019 | San Jose, California, United States
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Showing 5 of 7 Conference Committees
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