Dr. Daniel F. Sunday
at National Institute of Standards and Technology
SPIE Involvement:
Publications (14)

SPIE Journal Paper | 3 April 2023 Open Access
JM3, Vol. 22, Issue 03, 031206, (April 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031206
KEYWORDS: X-rays, Scattering, Metrology, Semiconductors, Critical dimension metrology, Lithography, Industry, Standards development, 3D metrology, Nanostructures

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 113250W (2020) https://doi.org/10.1117/12.2553371
KEYWORDS: Field effect transistors, Etching, Diffraction, X-rays, Metrology, Scattering, Data modeling, Critical dimension metrology, X-ray characterization, Nanostructures

SPIE Journal Paper | 3 November 2018
JM3, Vol. 17, Issue 04, 044002, (November 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.044002
KEYWORDS: Scattering, Nanostructures, X-rays, Silicon, Semiconductors, System on a chip, Time metrology, Laser scattering, Visualization, Computer simulations

Proceedings Article | 19 March 2018 Presentation
Proceedings Volume 10586, 105860X (2018) https://doi.org/10.1117/12.2297480
KEYWORDS: Scattering, X-rays, Directed self assembly, Integrated circuits, Optical lithography, Etching, 3D acquisition, 3D modeling

Proceedings Article | 13 March 2018 Presentation + Paper
G. Freychet, D. Kumar, R. Pandolfi, D. Staacks, P. Naulleau, R. J. Kline, D. Sunday , M. Fukuto, J. Strzalka, A. Hexemer
Proceedings Volume 10585, 1058512 (2018) https://doi.org/10.1117/12.2297518
KEYWORDS: X-rays, Scattering, Metrology, Grazing incidence, Nanostructures, Genetic algorithms

Showing 5 of 14 publications
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