Dr. Daniel F. Sunday
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Optical lithography, 3D acquisition, Scattering, Etching, X-rays, 3D modeling, Directed self assembly, Integrated circuits

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Nanostructures, Metrology, Genetic algorithms, Scattering, X-rays, Grazing incidence

PROCEEDINGS ARTICLE | May 25, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Thin films, Electron beam lithography, Scattering, Polymers, X-rays, Interfaces, Reflectivity, Extreme ultraviolet, Directed self assembly, Standards development

PROCEEDINGS ARTICLE | April 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Polymethylmethacrylate, Scattering, X-rays, Laser scattering, Nondestructive evaluation, Photoresist materials, Dimensional metrology, Extreme ultraviolet, Critical dimension metrology, Systems modeling

SPIE Journal Paper | February 8, 2017
JM3 Vol. 16 Issue 01
KEYWORDS: Scattering, Laser scattering, Silicon, X-rays, Sensors, X-ray sources, Synchrotrons, Semiconductors, Dimensional metrology

SPIE Journal Paper | July 7, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Detection and tracking algorithms, Scattering, X-rays, Genetic algorithms, Metrology, Computer simulations, Berkelium, Data modeling, Optimization (mathematics), Monte Carlo methods

Showing 5 of 11 publications
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