Dr. Daniel Sweat
at Brewer Science Inc
SPIE Involvement:
Publications (5)

Proceedings Article | 9 April 2024 Presentation + Paper
Si Li, Xinlin Lu, Stephen Grannemann, Daniel Sweat, Kelsey Brakensiek, Pengtao Lu, Joyce Lowes, Vandana Krishnamurthy, Veerle Van Driessche, Douglas Guerrero
Proceedings Volume 12957, 1295715 (2024) https://doi.org/10.1117/12.3010887
KEYWORDS: Polymers, Film thickness, Lithography, Extreme ultraviolet lithography, Semiconducting wafers, Coating, Tin, Silicon, Diffusion

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12957, 129571T (2024) https://doi.org/10.1117/12.3010498
KEYWORDS: Polymers, Extreme ultraviolet lithography, Line width roughness, Lithography, Adhesives, Adhesion, Extreme ultraviolet

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12957, 1295712 (2024) https://doi.org/10.1117/12.3009801
KEYWORDS: Extreme ultraviolet lithography, Photoresist materials, Adhesion, Etching, Semiconducting wafers, Extreme ultraviolet, Silicon, Line width roughness, Chemically amplified resists, Amorphous carbon

Proceedings Article | 20 March 2018 Paper
Proceedings Volume 10589, 105890S (2018) https://doi.org/10.1117/12.2297456
KEYWORDS: Etching, Carbon monoxide, Chemistry, Plasma etching, Oxygen, Plasma, Directed self assembly, Nitrogen

Proceedings Article | 27 March 2017 Presentation + Paper
Kui Xu, Mary Ann Hockey, Eric Calderas, Douglas Guerrero, Daniel Sweat, Jeffrey Fiehler, Richard Daugherty
Proceedings Volume 10146, 101460U (2017) https://doi.org/10.1117/12.2257354
KEYWORDS: Directed self assembly, Annealing, Polymers, Scanning electron microscopy, Wet etching, Glasses

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