Dr. Danilo Vrtacnik
Senior Researcher at Univ v Ljubljani
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 4 January 2006 Paper
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Dry etching, Ions, Silicon, Oxygen, Reactive ion etching, Anisotropic etching, Plasma

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Mirrors, Scattering, Etching, Crystals, Silicon, Light scattering, Laser scattering, Reflectivity, Semiconducting wafers, Anisotropy

Proceedings Article | 28 September 2001 Paper
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Oxides, Thin films, Ultrasonography, Etching, Silicon, Surface roughness, Scanning electron microscopy, Plasma enhanced chemical vapor deposition, Micromachining, Radium

Proceedings Article | 28 September 1999 Paper
Proc. SPIE. 3818, Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation II
KEYWORDS: Oxides, Capacitors, Ultraviolet radiation, Silicon, Diffusion, Quantum efficiency, Numerical simulations, Photodiodes, Molybdenum, Semiconducting wafers

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