Danny Reuter
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 19 September 2018 Paper
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Gold, Electron beam lithography, Two photon polymerization, Etching, Silicon, Chromium, Scanning electron microscopy, Photomasks, Semiconducting wafers, Network architectures

Proceedings Article | 21 May 2018 Paper
Proc. SPIE. 10686, Silicon Photonics: From Fundamental Research to Manufacturing
KEYWORDS: Plasmonics, Nanoantennas, Silica, Silicon, Electromagnetism, Optics manufacturing, Near field optics, Absorption

Proceedings Article | 28 September 2017 Paper
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

Proceedings Article | 31 August 2017 Paper
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Microelectromechanical systems, Reflectors, Nanostructures, Nanostructuring, Interferometers, Manufacturing, Reflectivity, Photonic crystals, Microopto electromechanical systems, Nanoimprint lithography

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Metals, Glasses, Copper, Silicon, CMOS technology, Semiconducting wafers, Wafer bonding

Showing 5 of 8 publications
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