Danny Reuter
at Technische Univ Chemnitz
SPIE Involvement:
Publications (8)

Proceedings Article | 19 September 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Two photon polymerization, Electron beam lithography, Semiconducting wafers, Silicon, Etching, Photomasks, Network architectures, Gold, Chromium, Scanning electron microscopy

Proceedings Article | 21 May 2018
Proc. SPIE. 10686, Silicon Photonics: From Fundamental Research to Manufacturing
KEYWORDS: Nanoantennas, Near field optics, Optics manufacturing, Silicon, Plasmonics, Electromagnetism, Absorption, Silica

Proceedings Article | 28 September 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanoimprint lithography, Silicon, Interferometers, Surface enhanced Raman spectroscopy, Nanostructuring, Nanostructures, Electron beam lithography, Photoresist processing

Proceedings Article | 31 August 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Reflectors, Reflectivity, Photonic crystals, Microelectromechanical systems, Nanoimprint lithography, Nanostructuring, Manufacturing, Nanostructures, Interferometers, Microopto electromechanical systems

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Wafer bonding, Glasses, Copper, Etching, CMOS technology, Sensors, Metals, Silicon

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Silicon, Semiconducting wafers, Resonators, Wafer bonding, Sensors, Etching, Electrodes, Deep reactive ion etching, Oxides, Aluminum

Showing 5 of 8 publications
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