Mr. Danny S. Reuter
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | May 21, 2018
Proc. SPIE. 10686, Silicon Photonics: From Fundamental Research to Manufacturing
KEYWORDS: Plasmonics, Nanoantennas, Silica, Silicon, Electromagnetism, Optics manufacturing, Near field optics, Absorption

PROCEEDINGS ARTICLE | September 28, 2017
Proc. SPIE. 10446, 33rd European Mask and Lithography Conference
KEYWORDS: Reflectors, Nanostructures, Electron beam lithography, Nanostructuring, Interferometers, Silicon, Surface enhanced Raman spectroscopy, Nanoimprint lithography, Photoresist processing

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Oxides, Resonators, Sensors, Etching, Electrodes, Silicon, Aluminum, Deep reactive ion etching, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | February 23, 2005
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Packaging, Silica, Sensors, Interfaces, Silicon, Coating, Aluminum, Semiconducting wafers, Adhesives, Wafer bonding

PROCEEDINGS ARTICLE | January 16, 2003
Proc. SPIE. 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II
KEYWORDS: Microelectromechanical systems, Actuators, Sensors, Etching, Metals, Silicon, Reliability, Photomasks, Aluminum, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top