Prof. Dan-Xia Xu Profile

Prof. Dan-Xia Xu

Principal Research Officer at National Research Council Canada

SPIE Involvement:

Conference Program Committee | Author

Publications (82)

Proceedings Article | 13 March 2024 Presentation

Presentation

Recent advances in integrated photonics with subwavelength and resonant metamaterials

Jens Schmid, Pavel Cheben, Jianhao Zhang, Maziyar Milanizadeh, Saad Bin-Alam, Dan-Xia Xu, Ross Cheriton, Martin Vachon, Shurui Wang, Rubin Ma, William Fraser, Shahrzad Khajavi, Winnie Ye, Pablo Ginel Moreno, Jose-Manuel Luque-González, Alejandro Fernández Hinestrosa, Alejandro Sanchez-Postigo, Robert Halir, Gonzalo Wanguemert-Perez, Alejandro Ortega-Monux, Inigo Molina-Fernández, Zindine Mokkedem, Daniele Melati, Carlos Alonso-Ramos, Laurent Vivien, Radovan Korcek, Daniel Benedikovic, Cameron Naraine, Jonathan Bradley, Yunus Sirmaci, Isabelle Staude

Proceedings Volume PC12889, PC128890M (2024) https://doi.org/10.1117/12.3000757

KEYWORDS: Quantum metamaterials, Photonic metamaterials, Integrated photonics, Quantum optics applications, Optical metamaterials, Industrial applications, Waveguides, Tunable filters, Silicon photonics, Quantum technology applications

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Proceedings Article | 12 March 2024 Presentation

Presentation

Experimental demonstration of a SiN integrated polarization beam splitter for the 950 nm wavelength band

Zindine Mokeddem, Laurent Vivien, Delphine Marris-Morini, Eric Cassan, Pavel Cheben, Jens Schmid, Dan-Xia Xu, Yuri Grinberg, Maziyar Milanizadeh, Carlos Ramos, Daniele Melati

Proceedings Volume PC12893, PC1289302 (2024) https://doi.org/10.1117/12.3002840

KEYWORDS: Polarization, Silicon nitride, Beam splitters, Quantum experiments, Polarization control, Photonic integrated circuits, Windows, Wave propagation, Transparency, Quantum technology applications

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Proceedings Article | 8 March 2024 Presentation + Paper

Presentation + Paper

Fabrication aware design of sensitive photonic devices

Odile Liboiron-Ladouceur, Dusan Gostimirovic, Dan-Xia Xu, Yuri Grinberg, Chenxin Xun, James Darby, Bokun Zhao

Proceedings Volume 12890, 128900A (2024) https://doi.org/10.1117/12.2692673

KEYWORDS: Design, Fabrication, Silicon photonics, Photonic devices, Scanning electron microscopy, Deep learning, Photonic integrated circuits

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Proceedings Article | 17 March 2023 Presentation + Paper

Presentation + Paper

Inverse design of robust photonic components

Yuri Grinberg, Dusan Gostimirovic, Guowu Zhang, Md Mahadi Masnad, Odile Liboiron-Ladouceur, Dan-Xia Xu

Proceedings Volume 12424, 124240C (2023) https://doi.org/10.1117/12.2650529

KEYWORDS: Artificial neural networks, Deep learning, Design and modelling, Fabrication, Etching, Demultiplexers, Silicon, Mathematical optimization, Crosstalk, Silicon photonics, Scanning electron microscopy, Manufacturing

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Proceedings Article | 17 March 2023 Presentation

Presentation

Subwavelength metamaterial devices with optimization and machine learning

Daniele Melati, Zindine Mokeddem, Paula Nuño-Ruano, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Carlos Alonso-Ramos, Yuri Grinberg, Muhammad Al-Digeil, Dan-Xia Xu, Maziyar Milanizadeh, Jianhao Zhang, Jens Schmid, Pavel Cheben, Shahrzad Khajavi, Winnie Ye, Abi Waqas, Paolo Manfredi

Proceedings Volume PC12425, PC1242509 (2023) https://doi.org/10.1117/12.2649953

KEYWORDS: Metamaterials, Machine learning, Control systems, Waveguides, Tolerancing, Silicon photonics, Silicon, Photonics systems, Photonics, Photonic devices

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Proceedings Article | 17 March 2023 Presentation

Presentation

Integrated silicon photonic optical phased arrays with large beam steering and high resolution

Winnie Ye, Daniel Benedikovic, Qiankun Liu, Shahrzad Khajavi, Daniele Melati, Pavel Cheben, Tom Smy, Ahmad Atieh, Alejandro Sánchez Postigo, Jens Schmid, Dan-Xia Xu, Xiaochen Xin

Proceedings Volume PC12425, PC124250G (2023) https://doi.org/10.1117/12.2650465

KEYWORDS: Beam steering, Phased array optics, Silicon photonics, LIDAR, Silicon, Optical components, Chemical elements, Unmanned vehicles, Solid state physics, Satellite communications

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Proceedings Article | 29 August 2022 Poster + Paper

Poster + Paper

Design and testing of an on-sky astrophotonic telescope platform for on-chip instrumentation

Erin M. Tonita, Volodymyr Artyshchuk, John Weber, Siegfried Janz, Adam Densmore, Suresh Sivanandam, Ernst de Mooij, Jens H. Schmid, Pavel Cheben, DanXia Xu, Karin Hinzer, Ross Cheriton

Proceedings Volume 12188, 121882Z (2022) https://doi.org/10.1117/12.2622465

KEYWORDS: Telescopes, Astrophotonics, Absorption, Domes, Optical instrument design, Spectroscopes, Resonators, Remote sensing, Astronomy, Carbon dioxide

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Proceedings Article | 29 August 2022 Poster + Paper

Poster + Paper

On-sky demonstration of astrophotonic fiber Fabry-Pérot correlation spectroscopy

Ross Cheriton, Erin Tonita, Volodymyr Artyshchuk, Adam Densmore, Suresh Sivanandam, Ernst de Mooij, Pavel Cheben, Dan-Xia Xu, Jens H. Schmid, Karin Hinzer, Siegfried Janz

Proceedings Volume 12188, 121885F (2022) https://doi.org/10.1117/12.2619244

KEYWORDS: Carbon dioxide, Absorption, Modulation, Optical filters, Tunable filters, Telescopes, Absorption filters, Exoplanets, Astrophotonics, Sun

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Proceedings Article | 5 March 2022 Presentation

Presentation

Iterative and efficient Bloch mode calculations for integrated photonics applications

Mohsen Kamandar Dezfouli, Daniele Melati, Yuri Grinberg, Muhammad Al-Digeil, Ross Cheriton, Pavel Cheben, Jens Schmid, Siegfried Janz, Dan-Xia Xu

Proceedings Volume PC12004, PC120040F (2022) https://doi.org/10.1117/12.2610477

KEYWORDS: Integrated photonics, Geometrical optics, Signal processing, Reliability, Photonics, Optimization (mathematics), Optical properties, Nanophotonics, Iterative methods, Analytical research

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Proceedings Article | 5 March 2022 Presentation

Presentation

Fiber Fabry-Pérot filter correlation spectroscopy for real-time radial velocity determination and astrophotonic gas sensing

Ross Cheriton, Erin Tonita, Volodymyr Artyshchuk, Adam Densmore, Suresh Sivanandam, Ernst de Mooij, Dan-Xia Xu, Jens Schmid, Pavel Cheben, Siegfried Janz

Proceedings Volume PC12008, PC1200809 (2022) https://doi.org/10.1117/12.2610397

KEYWORDS: Optical filters, Spectroscopy, Image filtering, Absorption, Exoplanets, Atmospheric sensing, Carbon dioxide, Absorption filters, Venus, Tunable filters

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Proceedings Article | 5 March 2022 Presentation

Presentation

Dimensionality reduction and optimization for the inverse design of photonic integrated devices

Daniele Melati, Mohsen Kamandar Dezfouli, Yuri Grinberg, Muhammad Al-Digeil, Dan-Xia Xu, Jens Schmid, Pavel Cheben, Abi Waqas, Paolo Manfredi, Shahrzad Khajavi, Winnie Ye, Paula Nuño-Ruano, Jianhao Zhang, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Carlos Alonso-Ramos

Proceedings Volume PC12005, PC120050D (2022) https://doi.org/10.1117/12.2617543

KEYWORDS: Photonic devices, Metamaterials, Machine learning

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Proceedings Article | 9 October 2021 Presentation + Paper

Presentation + Paper

Dimensionality reduction in designing advanced silicon photonic components

Yuri Grinberg, Muhammad Al-Digeil, Daniele Melati, Mohsen Kamandar Dezfouli, Jens Schmid, Pavel Cheben, Siegfried Janz, Dan-Xia Xu

Proceedings Volume 11903, 119030H (2021) https://doi.org/10.1117/12.2603513

KEYWORDS: Principal component analysis, Optical design, Neural networks, Silicon photonics, Machine learning, Visualization, Optical simulations, Nanophotonics

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Proceedings Article | 5 March 2021 Presentation + Paper

Presentation + Paper

Subwavelength-grating metamaterial integrated devices for the near- and mid-infrared wavelengths

Alejandro Sánchez-Postigo, J. Gonzalo Wangüemert-Pérez, Alejandro Ortega-Moñux, Robert Halir, Daniel Pereira-Martín, José Manuel Luque-González, Jens Schmid, Shurui Wang, Martin Vachon, Dan-Xia Xu, Jordi Soler Penadés, Milos Nedeljkovic, Goran Mashanovich, Pavel Cheben, Íñigo Molina-Fernández

Proceedings Volume 11689, 1168913 (2021) https://doi.org/10.1117/12.2577577

KEYWORDS: Metamaterials, Mid-IR, Silicon photonics, Waveguides, Silicon, Nanophotonics, Integrated photonics, Germanium, Transparency

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Proceedings Article | 5 March 2021 Presentation

Presentation

Machine-learning dimensionality reduction for multi-objective design of photonic devices

Daniele Melati, Mohsen Kamandar Dezfouli, Yuri Grinberg, Muhammad Al-Digeil, Siegfried Janz, Ross Cheriton, Jens Schmid, Pavel Cheben, Dan-Xia Xu

Proceedings Volume 11689, 116890H (2021) https://doi.org/10.1117/12.2586717

KEYWORDS: Photonic devices, Machine learning, Metamaterials, Tolerancing, Structural design, Modeling

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Proceedings Article | 5 March 2021 Presentation + Paper

Presentation + Paper

Design of fully apodized and perfectly vertical surface grating couplers using machine learning optimization

Mohsen Kamandar Dezfouli, Yuri Grinberg, Daniele Melati, Jens Schmid, Pavel Cheben, Siegfried Janz, Dan-Xia Xu

Proceedings Volume 11689, 116890J (2021) https://doi.org/10.1117/12.2576945

KEYWORDS: Optical design, Machine learning, Waveguides, Diffraction gratings, Silicon, Optical fibers, Integrated optics, Reflection, Packaging, Interfaces

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Proceedings Article | 13 December 2020 Presentation

Presentation

Integrated photonic correlation spectroscopy for faint exoplanet biosignature detection

Ross Cheriton, Adam Densmore, Suresh Sivanandam, Ernst de Mooij, Daniele Melati, Mohsen Kamandar Dezfouli, Jens Schmid, Jean Lapointe, Shurui Wang, Rubin Ma, Dan-Xia Xu, Luc Simard, Siegfried Janz

Proceedings Volume 11446, 114461T (2020) https://doi.org/10.1117/12.2560811

KEYWORDS: Exoplanets, Spectroscopy, Integrated photonics, Absorption, Resonators, Molecules, Earth's atmosphere, Space telescopes, Carbon dioxide, Spectroscopic atmospheric monitoring techniques

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Proceedings Article | 2 April 2020 Presentation + Paper

Presentation + Paper

Design of multi-parameter photonic devices using machine learning pattern recognition

Daniele Melati, Yuri Grinberg, Mohsen Kamandar Dezfouli, Jens Schmid, Pavel Cheben, Siegfried Janz, Ross Cheriton, Alejandro Sánchez-Postigo, James Pond, Jens Niegemann, Adam Reid, Dan-Xia Xu

Proceedings Volume 11364, 1136408 (2020) https://doi.org/10.1117/12.2559583

KEYWORDS: Silicon photonics, Photonic devices, Pattern recognition, Machine learning, Optimization (mathematics), Principal component analysis, Waveguides, Integrated photonics, Finite-difference time-domain method

Read Abstract +

Enabled by technological improvements, photonic devices and circuits are becoming increasingly more complex. Non-trivial geometries are designed to reduce device footprint, improve performance, and introduce novel functionalities. However, the number of design variables required to properly represent these geometries quickly grows, limiting the effectiveness of classical design approaches. Moreover, parameters are often strongly interdependent, restricting the use of sequential optimizations or independent parameter sweeps. Although several optimization techniques can be effective for multi-parameter design, they commonly allow to optimize for a single or a handful designs and the optimization process needs to be repeated if new performance criteria are introduced. In contrast to classical design approaches, the in uences of the design parameters remain hidden as well as the general behavior of the design space. In this paper we present an extension of our recent work on the application of machine learning pattern recognition to the design of multi-parameter photonic devices. In particular, we propose using a combination of local optimization based on the adjoint method and the use of dimensionality reduction. Adjoint optimization is used multiple times to generate a small set of different designs with high performance. Dimensionality reduction is applied to analyze the relationship between these degenerate designs and identify a lower-dimensional design sub-space that includes all alternative good designs. This sub-space can be mapped for any performance criteria thus enabling informed decisions based on the relative priorities of all relevant performance specifications. As a proof of concept, we demonstrate a ten-parameter design of an integrated photonic power splitter using silicon-on-insulator technology. We identify a region of possible high performance design solutions and select two design candidates either maximizing the splitter efficiency or minimizing back-reflection.

Proceedings Article | 9 March 2020 Presentation

Presentation

Smart on-chip Fourier-transform spectrometers harnessing machine learning algorithms (Conference Presentation)

Alaine Herrero-Bermello, Jiangfeng Li, Mohammad Khazaei, Yuri Grinberg, Aitor Velasco, Martin Vachon, Pavel Cheben, Lina Stankovic, Vladimir Stankovic, Dan-Xia Xu, Jens Schmid, Carlos Alonso-Ramos

Proceedings Volume 11284, 112841W (2020) https://doi.org/10.1117/12.2546253

KEYWORDS: Spectrometers, Machine learning, Absorption, Silicon photonics, Temperature metrology, Silicon, Detection and tracking algorithms, Spectroscopy, Medicine, Environmental sensing

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Proceedings Article | 12 September 2019 Presentation

Presentation

Ultra-compact remote CO2 detection with silicon waveguide ring resonators (Conference Presentation)

Ross Cheriton, Suresh Sivanandam, Adam Densmore, Daniele Melati, Mohsen Kamandar Dezfouli, Danxia Xu, Jens Schmidt, Jean Lapointe, Luc Simard, Pavel Cheben, Siegfried Janz

Proceedings Volume 11129, 111290K (2019) https://doi.org/10.1117/12.2529367

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Proceedings Article | 26 April 2019 Open Access

Open Access

Paper

Navigating through complex photonic design space using machine learning methods

Dan-Xia Xu, Yuri Grinberg, Daniele Melati, Moshen Kamandar Desfouli, Pavel Cheben, Jens Schmid, Siegfried Janz

Proceedings Volume 11031, 110310S (2019) https://doi.org/10.1117/12.2524909

KEYWORDS: Machine learning, Nanophotonics, Optimization (mathematics), Artificial neural networks, Principal component analysis, Metamaterials, Genetic algorithms, Integrated photonics, Silicon photonics, Pattern recognition

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Proceedings Article | 4 March 2019 Paper

Paper

Reaping the benefits of machine learning pattern recognition in nanophotonic component design

Yuri Grinberg, Daniele Melati, Mohsen Kamandar Dezfouli, Siegfried Janz, Jens Schmid, Pavel Cheben, Alejandro Sánchez-Postigo, J. Gonzalo Wangüemert-Pérez, Iñigo Molina-Fernández, Alejandro Ortega-Moñux, Dan-Xia Xu

Proceedings Volume 10921, 109210B (2019) https://doi.org/10.1117/12.2506787

KEYWORDS: Machine learning, Optical design, Silicon, Nanophotonics, Pattern recognition, Principal component analysis, Metamaterials, Device simulation, Optimization (mathematics)

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Proceedings Article | 4 March 2019 Presentation

Presentation

Engineering sub-wavelength silicon waveguides for sensing applications in the near-infrared and mid-infrared band (Conference Presentation)

Juan Gonzalo Wangüemert-Pérez, Alejandro Sánchez-Postigo, Abdelfettah Hadij-ElHouati, Jonas Leuermann, Carlos Pérez-Armenta, Faysal El Mokhtari Mimun, Daniel Pereira-Martín, José Manuel Luque-González, Alejandro Ortega-Moñux, Robert Halir, Iñigo Molina-Fernández, Pavel Cheben, Jens Schmid, Dan-Xia Xu, Jirí Čtyroký, Jordi Soler-Penades, Milos Nedeljkovic, Goran Mashanovich

Proceedings Volume 10923, 1092307 (2019) https://doi.org/10.1117/12.2508749

KEYWORDS: Waveguides, Silicon, Mid-IR, Light-matter interactions, Silicon photonics, Lab on a chip, Diffraction gratings, Silica, Metamaterials, Cladding

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Proceedings Article | 4 March 2019 Presentation + Paper

Presentation + Paper

Performance robustness analysis in machine-assisted design of photonic devices

Daniele Melati, Yuri Grinberg, Abi Waqas, Paolo Manfredi, Mohsen Kamandar Dezfouli, Pavel Cheben, Jens Schmid, Siegfried Janz, Andrea Melloni, Dan-Xia Xu

Proceedings Volume 10922, 1092203 (2019) https://doi.org/10.1117/12.2508602

KEYWORDS: Monte Carlo methods, Stochastic processes, Photonic devices, Waveguides, Machine learning, Optimization (mathematics), Optical design

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Proceedings Article | 4 March 2019 Presentation + Paper

Presentation + Paper

Temperature-insensitive echelle wavelength demultiplexer on standard silicon-on-insulator platform

Daniele Melati, Pierre Verly, André Delâge, Pavel Cheben, Jens Schmid, Siegfried Janz, Dan-Xia Xu

Proceedings Volume 10923, 109230Q (2019) https://doi.org/10.1117/12.2508633

KEYWORDS: Waveguides, Optical design, Demultiplexers, Optical filters, Mach-Zehnder interferometers, Silicon photonics

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Proceedings Article | 17 May 2018 Paper

Paper

Spectral retrieval techniques for high-resolution Fourier-transform micro-spectrometers

Alaine Herrero-Bermello, Aitor Velasco, Hugh Podmore, Pavel Cheben, Jens Schmid, Siegfried Janz, María Calvo, Dan-Xia Xu, Alan Scott, Regina Lee

Proceedings Volume 10683, 1068319 (2018) https://doi.org/10.1117/12.2306130

KEYWORDS: Waveguides, Calibration, Fourier transforms, Silicon, Spectral resolution, Spectrometers, Interferometers, Transmittance, Heterodyning

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Proceedings Article | 16 June 2017 Presentation

Presentation

Design of optical metamaterial waveguide structures (Conference Presentation)

Alejandro Ortega-Moñux, Robert Halir, Alejandro Sánchez-Postigo, Jordi Soler-Penadés, Jirí Ctyroký, José Manuel Luque-González, José Darío Sarmiento-Merenguel, Juan Gonzalo Wangüemert-Pérez, Jens Schmid, Dan-Xia Xu, Sigfried Janz, Jean Lapointe, Iñigo Molina-Fernández, Milos Nedeljkovic, Goran Mashanovich, Pavel Cheben

Proceedings Volume 10242, 102420D (2017) https://doi.org/10.1117/12.2268861

KEYWORDS: Wave propagation, Radio propagation, Waveguides, Integrated optics, Mid-IR, Brain-machine interfaces, Diffraction gratings, Beam splitters, Optical design, Optical metamaterials

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Proceedings Article | 16 June 2017 Presentation

Presentation

Silicon subwavelength structures for communications and sensing (Conference Presentation)

Robert Halir, Juan Manuel Luque-González, Gonzalo Wangüemert-Pérez, Alejandro Ortega-Moñux, Dan-Xia Xu, Jens Schmid, Pavel Cheben, Íñigo Molina-Fernández

Proceedings Volume 10249, 1024904 (2017) https://doi.org/10.1117/12.2267644

KEYWORDS: Anisotropy, Current controlled current source, Waveguides, Integrated photonics, Silicon, Fiber couplers, Structured optical fibers, Spectrometers, Refractive index, Electromagnetism

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Proceedings Article | 20 February 2017 Paper

Paper

Subwavelength metamaterial engineering for silicon photonics

Robert Halir, Alejandro Ortega-Moñux, Jordi Soler-Penades, José Luque-González, Dario Sarmiento-Merenguel, Alejandro Sánchez-Postigo, Gonzalo Wangüemert-Pérez, Jens Schmid, Dan-Xia Xu, Siegfried Janz, Jean Lapointe, Íñigo Molina-Fernández, Milos Nedeljkovic, Goran Mashanovich, Pavel Cheben

Proceedings Volume 10107, 1010703 (2017) https://doi.org/10.1117/12.2253727

KEYWORDS: Anisotropy, Waveguides, Silicon photonics, Metamaterials, Structural engineering, Mid-IR, Dispersion, Beam splitters, Oxides, Photonic integrated circuits, Diffraction, Silicon, Refractive index, Brain-machine interfaces, Scanning electron microscopy

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Proceedings Article | 27 July 2016 Presentation

Presentation

Silicon-on-insulator integrated tunable polarization controller (Conference Presentation)

Jose-Dario Sarmiento-Merenguel, Carlos Alonso-Ramos, Robert Halir, Xavier Le Roux, Laurent Vivien, Pavel Cheben, Elena Durán-Valdeiglesias, Iñigo Molina-Fernández, Delphine Marris-Morini, Danxia Xu, Jens Schmid, Siegfried Janz, Alejandro Ortega-Moñux

Proceedings Volume 9891, 989108 (2016) https://doi.org/10.1117/12.2229352

KEYWORDS: Polarization, Phase shifts, Silicon, Tolerancing, Silicon photonics, Integrated optics, Chemical elements, Integration, Photon polarization, Optical communications, Optical imaging, Quantum information

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Proceedings Article | 1 May 2015 Paper

Paper

High efficiency blazed fiber-chip grating coupler with interleaved trenches

C. Alonso-Ramos, D. Benedikovic, P, Cheben, S, Wang, R, Halir, J. Fédéli, A. Ortega-Moñux, J. Schmid, D. Xu, M. Dado, I. Molina-Fernández

Proceedings Volume 9516, 95160J (2015) https://doi.org/10.1117/12.2178620

KEYWORDS: Etching, Silicon, Silicon photonics, Electroluminescent displays, Fiber couplers, Oxides, Deep ultraviolet, Semiconducting wafers, Waveguides, Lithography

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Proceedings Article | 1 May 2015 Paper

Paper

High-efficiency fully etched fiber-chip grating couplers with subwavelength structures for datacom and telecom applications

Daniel Benedikovic, Pavel Cheben, Jens Schmid, Dan-Xia Xu, Jean Lapointe, Shurui Wang, Siegfried Janz, Robert Halir, Alejandro Ortega-Moñux, Milan Dado

Proceedings Volume 9516, 95160I (2015) https://doi.org/10.1117/12.2177861

KEYWORDS: Fiber couplers, Diffraction gratings, Optical design, Silicon, Refractive index, Waveguides, Data communications, Deep ultraviolet, Silicon photonics, Optical fibers

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Proceedings Article | 1 May 2015 Paper

Paper

Fiber-chip edge coupler with large mode size for silicon photonic wire waveguides

Martin Papes, Pavel Cheben, Winnie Ye, Jens Schmid, Dan-Xia Xu, Siegfried Janz, Daniel Benedikovic, Carlos Ramos, Robert Halir, Alejandro Ortega-Moñux, André Delâge, Vladimír Vašinek

Proceedings Volume 9516, 95160K (2015) https://doi.org/10.1117/12.2181547

KEYWORDS: Waveguides, Optical fibers, Silicon, Cladding, Silica, Fiber couplers, Refractive index, Silicon photonics, Polarization, Integrated optics

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Proceedings Article | 19 February 2014 Paper

Paper

Subwavelength metastructures for dispersion engineering in planar waveguide devices

Robert Halir, Alejandro Ortega-Moñux, Pavel Cheben, Alejandro Maese-Novo, Diego Pérez-Galacho, Carlos Alonso-Ramos, Íñigo Molina-Fernández, J. Wangüemert-Pérez, Jens Schmid, Dan-Xia Xu, Siegfried Janz

Proceedings Volume 8995, 89950U (2014) https://doi.org/10.1117/12.2045727

KEYWORDS: Brain-machine interfaces, Waveguides, Dispersion, Polarization, Silicon, Birefringence, Refractive index, Integrated optics, Fiber couplers, Planar waveguides

Read Abstract +

Proceedings Article | 7 May 2013 Paper

Paper

A general approach for robust integrated polarization rotators

C. Alonso-Ramos, R. Halir, Al. Ortega-Moñux, P. Cheben, L. Vivien, Iñ. Molina-Fernández, D. Marris-Morini, Si. Janz, D.-X. Xu, J. Schmid

Proceedings Volume 8781, 878109 (2013) https://doi.org/10.1117/12.2016845

KEYWORDS: Polarization, Waveguides, Phase shifts, Lawrencium, Waveguide modes, Tolerancing, Refractive index, Wave propagation, Thermal optics, Phase shifting

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Proceedings Article | 24 October 2012 Paper

Paper

Temperature-independent silicon waveguides comprising bridged subwavelength gratings

M. Ibrahim, A. Aleali, J. Schmid, P. Cheben, J. Lapointe, S. Janz, P. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, W. Ye

Proceedings Volume 8412, 84120Z (2012) https://doi.org/10.1117/12.2001480

KEYWORDS: Waveguides, Silicon, Bridges, Wave propagation, Polarization, Thermal optics, Refractive index, Photonics, Silicon photonics, Temperature metrology

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Proceedings Article | 10 May 2012 Paper

Paper

Grating couplers in thick rib SOI waveguides for TE and TM polarizations

C. Alonso-Ramos, A. Ortega-Moñux, R. Halir, L. Zavargo-Peche, I. Molina-Fernández, P. Cheben, D.-X. Xu, S. Janz

Proceedings Volume 8431, 84310E (2012) https://doi.org/10.1117/12.922713

KEYWORDS: Waveguides, Polarization, Fiber couplers, Optical design, Optical fibers, Silicon, Etching, Diffraction gratings, Tolerancing, Wave propagation

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Proceedings Article | 2 February 2012 Paper

Paper

Selecting the polarization in silicon photonic wire components

Dan-Xia Xu, André Delâge, Jens Schmid, Rubin Ma, Shurui Wang, Jean Lapointe, Martin Vachon, Pavel Cheben, Siegfried Janz

Proceedings Volume 8266, 82660G (2012) https://doi.org/10.1117/12.911368

KEYWORDS: Polarization, Waveguides, Silicon, Resonators, Silicon photonics, Birefringence, Directional couplers, Semiconducting wafers, Cladding, Lithography

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Proceedings Article | 2 February 2012 Paper

Paper

New concepts in silicon component design using subwavelength structures

Iñigo Molina-Fernandez, Robert Halir, Alejandro Ortega-Moñux, Luis Zavargo-Peche, Sebastian Romero García, Alejandro Maese-Novo, Diego Perez-Galacho, Gonzalo Wanguemert-Perez, Pavel Cheben, Dan-Xia Xu

Proceedings Volume 8266, 82660E (2012) https://doi.org/10.1117/12.906785

KEYWORDS: Waveguides, Silicon, Polarization, Refractive index, Fiber couplers, Etching, Dispersion, Brain-machine interfaces, Optical design, Wave propagation

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Proceedings Article | 8 September 2011 Paper

Paper

Athermal silicon subwavelength grating waveguides

M. Ibrahim, J. Schmid, P. Cheben, J. Lapointe, S. Janz, P. Bock, A. Densmore, B. Lamontagne, R. Ma, D.-X. Xu, W. Ye

Proceedings Volume 8007, 80071L (2011) https://doi.org/10.1117/12.905685

KEYWORDS: Waveguides, Silicon, Polarization, Thermal optics, Polymers, Polymer multimode waveguides, Numerical simulations, Refractive index, Diffraction gratings, Silicon photonics

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Proceedings Article | 18 February 2011 Paper

Paper

Improved coupling to integrated spatial heterodyne spectrometers with applications to space

A. Scott, P. Bock, C. Ramos, B. Lamontagne, P. Cheben, M. Florjańczyk, I. Fernandez, S. Janz, A. Ortega-Monux, B. Solheim, D.-X. Xu

Proceedings Volume 7928, 79280K (2011) https://doi.org/10.1117/12.877208

KEYWORDS: Spectrometers, Waveguides, Heterodyning, Fourier transforms, Etching, Remote sensing, Spectral resolution, Finite-difference time-domain method, Waveguide modes, Sensors

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Proceedings Article | 8 February 2011 Paper

Paper

Silicon photonic wire evanescent field sensors: sensor arrays and instrumentation

S. Janz, A. Densmore, D.-X. Xu, P. Cheben, R. Ma, J. Schmid, A. Delâge, M. Vachon, J. Lapointe, N. Sabourin, W. Sinclair, Y. Li, T. Mischki, G. Lopinski, R. MacKenzie, Q. Liu, E. Post, B. Lamontagne, R. Halir, I. Molina-Fernandez

Proceedings Volume 7888, 788805 (2011) https://doi.org/10.1117/12.875471

KEYWORDS: Sensors, Waveguides, Molecules, Silicon, Silicon photonics, Resonators, Microfluidics, Molecular photonics, Refractive index, Waveguide modes

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Proceedings Article | 19 January 2011 Paper

Paper

Subwavelength and diffractive waveguide structures and their applications in nanophotonics and sensing

P. Cheben, P. Bock, J. Schmid, J. Lapointe, S. Janz, D.-X. Xu, R. Ma, A. Densmore, A. Delâge, B. Lamontagne, T. Hall, R. Halir, I. Molina-Fernández, J.-M. Fédéli

Proceedings Volume 7941, 794111 (2011) https://doi.org/10.1117/12.875431

KEYWORDS: Waveguides, Silicon, Refractive index, Polarization, Fiber couplers, Cladding, Light wave propagation, Nanostructures, Photonics, Planar waveguides

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Proceedings Article | 17 January 2011 Paper

Paper

Engineering light at the sub-wavelength scale using silicon photonics

S. Janz, P. Cheben, J. Schmid, P. Bock, R. Halir, D.-X. Xu, A. Densmore, R. Ma, I. Molina-Fernandez, A. Delâge, M. Vachon, J. Lapointe, W. Sinclair, E. Post, B. Lamontagne

Proceedings Volume 7943, 79430G (2011) https://doi.org/10.1117/12.875488

KEYWORDS: Waveguides, Sensors, Silicon, Cladding, Silicon photonics, Etching, Waveguide sensors, Refractive index, Electron beam lithography, Waveguide modes

Read Abstract +

Proceedings Article | 23 September 2010 Paper

Paper

Quantum dot multiwavelength comb lasers with Si ring resonator

W. Y. Li, Z. G. Lu, D. X. Xu, J. R. Liu, P. Poole, P. Barrios, D. Poitras, R. Ma, J. Lapointe, M. Vachon, S. Janz

Proceedings Volume 7750, 77501U (2010) https://doi.org/10.1117/12.872726

KEYWORDS: Resonators, Laser resonators, Semiconductor lasers, Silicon, Waveguides, Quantum dots, Optical filters, Quantum dot lasers, Tunable lasers, Dispersion

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Proceedings Article | 18 February 2010 Paper

Paper

Development of a slab waveguide spatial heterodyne spectrometer for remote sensing

Miroslaw Florjańczyk, Pavel Cheben, Siegfried Janz, Boris Lamontagne, Jean Lapointe, Alan Scott, Brian Solheim, Dan-Xia Xu

Proceedings Volume 7594, 75940R (2010) https://doi.org/10.1117/12.842369

KEYWORDS: Waveguides, Spectroscopy, Calibration, Heterodyning, Silicon, Sensors, Detector arrays, Fourier transforms, Mach-Zehnder interferometers, Optical filters

Read Abstract +

Proceedings Article | 17 February 2010 Paper

Paper

Arrays of SOI photonic wire biosensors for label-free molecular detection

Adam Densmore, Dan-Xia Xu, Martin Vachon, Siegfried Janz, Rubin Ma, Yunhui Li, Gregory Lopinski, Christian Luebbert, Qing Liu, Jens Schmid, André Delâge, Pavel Cheben

Proceedings Volume 7606, 76060C (2010) https://doi.org/10.1117/12.842027

KEYWORDS: Sensors, Waveguides, Microfluidics, Biosensors, Mach-Zehnder interferometers, Molecular photonics, Silicon photonics, Infrared sensors, Waveguide modes, Phase shifts

Read Abstract +

Proceedings Article | 17 February 2010 Paper

Paper

Applications of subwavelength grating structures in silicon-on-insulator waveguides

Jens Schmid, Przemek Bock, Pavel Cheben, William Sinclair, Jaime García, Siegfried Janz, Jean Lapointe, Geoffrey Aers, Daniel Poitras, Yunhui Li, Gregory Lopinski, André Delâge, Adam Densmore, Boris Lamontagne, Rubin Ma, Dan-Xia Xu

Proceedings Volume 7606, 76060F (2010) https://doi.org/10.1117/12.841022

KEYWORDS: Waveguides, Silicon, Photonics, Refractive index, Sensors, Dispersion, Reflectivity, Dielectrics, Silicon photonics, Fiber couplers

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Proceedings Article | 18 May 2009 Paper

Paper

Slab waveguide spatial heterodyne spectrometers for remote sensing from space

Miroslaw Florjanczyk, Pavel Cheben, Siegfried Janz, Boris Lamontagne, Jean Lapointe, Alan Scott, Brian Solheim, Dan-Xia Xu

Proceedings Volume 7356, 73560V (2009) https://doi.org/10.1117/12.820924

KEYWORDS: Waveguides, Spectrometers, Heterodyning, Interferometers, Silicon, Wavefronts, Fourier transforms, Calibration, Spectral resolution, Remote sensing

Read Abstract +

Proceedings Article | 24 February 2009 Paper

Paper

Micro-interferometer with high throughput for remote sensing

Alan Scott, Mirosław Florjańczyk, Pavel Cheben, Siegfried Janz, Brian Solheim, Dan-Xia Xu

Proceedings Volume 7208, 72080G (2009) https://doi.org/10.1117/12.808271

KEYWORDS: Waveguides, Spectroscopy, Remote sensing, Signal to noise ratio, Sensors, Fourier transforms, Spectral resolution, Detector arrays, Silicon, Calibration

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Proceedings Article | 18 February 2009 Paper

Paper

Sub-wavelength grating gradient index mode transformers in high index contrast slab waveguides

P. Bock, P. Cheben, J. Schmid, D.-X. Xu, S. Janz, T. Hall

Proceedings Volume 7220, 722005 (2009) https://doi.org/10.1117/12.809736

KEYWORDS: Etching, Waveguides, Transformers, Polarization, Diffraction gratings, Silicon, Gradient-index optics, Finite-difference time-domain method, Teeth, GRIN lenses

Read Abstract +

Proceedings Article | 10 February 2009 Paper

Paper

Optoelectronic integration of silicon photonic wire biosensors

A. Densmore, S. Janz, D.-X. Xu, M. Vachon, P. Waldron, J. Schmid, J. Lapointe, T. Mischki, G. Lopinski, A. Delâge, P. Cheben, R. Ma

Proceedings Volume 7219, 72190M (2009) https://doi.org/10.1117/12.811602

KEYWORDS: Waveguides, Sensors, Molecules, Silicon photonics, Silicon, Resonators, Optical fibers, Biosensors, Mach-Zehnder interferometers, Cladding

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Proceedings Article | 10 February 2009 Paper

Paper

Multi-aperture Fourier spectrometers in planar waveguides

Miroslaw Florjanczyk, Pavel Cheben, Siegfried Janz, Boris Lamontagne, Jean Lapointe, Alan Scott, Kenneth Sinclair, Brian Solheim, Dan-Xia Xu

Proceedings Volume 7218, 721816 (2009) https://doi.org/10.1117/12.810724

KEYWORDS: Waveguides, Spectrometers, Interferometers, Silicon, Heterodyning, Planar waveguides, Mach-Zehnder interferometers, Fabry–Perot interferometry, Spectral resolution, Apodization

Read Abstract +

Proceedings Article | 12 August 2008 Paper

Paper

Broadband polarization compensation in silicon-on-insulator components using cladding stress engineering

Dan-Xia Xu, André Delâge, Siegfried Janz, Pavel Cheben

Proceedings Volume 7099, 70991O (2008) https://doi.org/10.1117/12.807478

KEYWORDS: Birefringence, Waveguides, Cladding, Polarization, Resonators, Silicon, Brain-machine interfaces, Oxides, Dispersion, Silica

Read Abstract +

Proceedings Article | 12 August 2008 Paper

Paper

Spatial heterodyne planar waveguide spectrometer: theory and design

Miroslaw Florjanczyk, Pavel Cheben, Siegfried Janz, Alan Scott, Brian Solheim, Dan-Xia Xu

Proceedings Volume 7099, 70991L (2008) https://doi.org/10.1117/12.806822

KEYWORDS: Calibration, Spectroscopy, Waveguides, Heterodyning, Bismuth, Planar waveguides, Error analysis, Mach-Zehnder interferometers, Spectrometer engineering, Fourier transforms

Read Abstract +

Proceedings Article | 13 February 2008 Paper

Paper

Spotter-compatible SOI waveguide devices for biomolecular sensing

Adam Densmore, Dan-Xia Xu, Philip Waldron, Siegfried Janz, Jean Lapointe, Trevor Mischki, Gregory Lopinski, André Delâge, Pavel Cheben

Proceedings Volume 6898, 68981B (2008) https://doi.org/10.1117/12.763699

KEYWORDS: Waveguides, Sensors, Resonators, Mach-Zehnder interferometers, Silicon, Silicon photonics, Molecules, Semiconducting wafers, Biosensing, Waveguide sensors

Read Abstract +

Proceedings Article | 12 February 2008 Paper

Paper

Demultiplexer with blazed waveguide sidewall grating and subwavelength grating structure

Przemek Bock, Pavel Cheben, Jens Schmid, Dan-Xia Xu, Siegfried Janz, Trevor Hall

Proceedings Volume 6896, 68960H (2008) https://doi.org/10.1117/12.763357

KEYWORDS: Waveguides, Diffraction gratings, Demultiplexers, Silicon, Modulation, Diffraction, Phase shift keying, GRIN lenses, Apodization, Optical design

Read Abstract +

Proceedings Article | 30 October 2007 Paper

Paper

Mirror cavity MMI-coupled photonic wire resonator in SOI

P. Bock, P. Cheben, D.-X. Xu, S. Janz, T. Hall

Proceedings Volume 6796, 67963N (2007) https://doi.org/10.1117/12.779226

KEYWORDS: Brain-machine interfaces, Resonators, Waveguides, Mirrors, Silicon, Finite-difference time-domain method, Multimode interference devices, Wave propagation, Polarization, Optoelectronic devices

Read Abstract +

Proceedings Article | 30 October 2007 Paper

Paper

Planar waveguide spatial heterodyne spectrometer

Mirosław Florjańczyk, Pavel Cheben, Siegfried Janz, Alan Scott, Brian Solheim, Dan-Xia Xu

Proceedings Volume 6796, 67963J (2007) https://doi.org/10.1117/12.779056

KEYWORDS: Waveguides, Spectroscopy, Birefringence, Heterodyning, Glasses, Planar waveguides, Absorption, Apodization, Polarization, Interferometers

Read Abstract +

Proceedings Article | 26 October 2007 Paper

Paper

Subwavelength grating structures in planar waveguide facets for modified reflectivity

Jens Schmid, Pavel Cheben, Siegfried Janz, Jean Lapointe, Edith Post, André Delâge, Adam Densmore, Boris Lamontagne, Philip Waldron, Dan-Xia Xu

Proceedings Volume 6796, 67963E (2007) https://doi.org/10.1117/12.779053

KEYWORDS: Reflectivity, Waveguides, Finite-difference time-domain method, Silicon, Polarization, Modulation, Antireflective coatings, GRIN lenses, Refractive index, Planar waveguides

Read Abstract +

Proceedings Article | 26 October 2007 Paper

Paper

Label-free biosensing using silicon planar waveguide technology

Adam Densmore, Dan-Xia Xu, Philip Waldron, Siegfried Janz, André Delâge, G. Lopinski, T. Mischki, Pavel Cheben, Edith Post, Jean Lapointe, Jens Schmid

Proceedings Volume 6796, 67962X (2007) https://doi.org/10.1117/12.778936

KEYWORDS: Waveguides, Sensors, Silicon, Silicon photonics, Planar waveguides, Refractive index, Mach-Zehnder interferometers, Cladding, Waveguide modes, Photonics

Read Abstract +

SPIE Journal Paper | 1 October 2007

Group-index birefringence and loss measurements in silicon-on-insulator photonic wire waveguides

David Duchense, Pavel Cheben, Roberto Morandotti, Boris Lamontagne, Dan-Xia Xu, Siegfried Janz, Demetrios Christodoulides

OE, Vol. 46, Issue 10, 104602, (October 2007) https://doi.org/10.1117/12.10.1117/1.2793711

KEYWORDS: Waveguides, Birefringence, Polarization, Silicon, Dispersion, Silicon photonics, Light wave propagation, Reflectivity, Optical engineering, Wave propagation

Read Abstract +

Proceedings Article | 9 February 2007 Paper

Paper

Scattering loss measurement of SOI waveguides using 5X17 integrated optical star coupler

K. Yap, A. Delâge, B. Lamontagne, S. Janz, Dan-Xia Xu, J. Lapointe, P. Waldron, J. Schmid, P. Chow-Chong, E. Post, B. Syrett

Proceedings Volume 6477, 64770J (2007) https://doi.org/10.1117/12.701199

KEYWORDS: Waveguides, Scattering, Polarization, Stars, Scanning electron microscopy, Lithography, Photoresist materials, Scatter measurement, Chromium, Etching

Read Abstract +

Proceedings Article | 9 February 2007 Paper

Paper

Thin silicon waveguides for biological and chemical sensing

Adam Densmore, Dan-Xia Xu, Philip Waldron, Siegfried Janz, André Delâge, Pavel Cheben, Jean Lapointe

Proceedings Volume 6477, 647718 (2007) https://doi.org/10.1117/12.700916

KEYWORDS: Waveguides, Sensors, Silicon, Polarization, Resonators, Cladding, Biological and chemical sensing, Refractive index, Brain-machine interfaces, Waveguide modes

Read Abstract +

Proceedings Article | 9 February 2007 Paper

Paper

Broadband silicon-on-insulator passive polarization splitters

Winnie Ye, Dan-Xia Xu, Siegfried Janz, Philip Waldron, N. Garry Tar

Proceedings Volume 6477, 64770G (2007) https://doi.org/10.1117/12.701279

KEYWORDS: Polarization, Waveguides, Cladding, Oxides, Silicon, Birefringence, Brain-machine interfaces, Phase shifts, Mach-Zehnder interferometers, Silicon films

Read Abstract +

Proceedings Article | 9 February 2007 Paper

Paper

Polarization-insensitive MMI-coupled ring resonators in silicon-on-insulator using cladding stress engineering

Dan-Xia Xu, Pavel Cheben, Andre Delâge, Siegfried Janz, Boris Lamontagne, Edith Post, Winnie Ye

Proceedings Volume 6477, 64770D (2007) https://doi.org/10.1117/12.701997

KEYWORDS: Waveguides, Resonators, Polarization, Brain-machine interfaces, Cladding, Birefringence, Oxides, Silicon, Etching, Directional couplers

Read Abstract +

Proceedings Article | 1 March 2006 Paper

Paper

Monolithically integrated graded-index waveguide input couplers for silicon-photonics

S. Janz, A. Delage, B. Lamontagne, A. Bogdanov, D. Dalacu, D.-X. Xu, K.P. Yap

Proceedings Volume 6125, 61250M (2006) https://doi.org/10.1117/12.648750

KEYWORDS: Waveguides, GRIN lenses, Silicon, Amorphous silicon, Waveguide modes, Polarization, Refractive index, Tolerancing, Wave propagation, Etching

Read Abstract +

Proceedings Article | 7 March 2005 Paper

Paper

Design of polarization-insensitive components using geometrical and stress-induced birefringence in SOI waveguides

Dan-Xia Xu, Winnie Ye, Alexei Bogdanov, Dan Dalacu, Andre Delage, Pavel Cheben, Siegfried Janz, Boris Lamontagne, Marie-Josee Picard

Proceedings Volume 5730, (2005) https://doi.org/10.1117/12.589158

KEYWORDS: Waveguides, Birefringence, Cladding, Oxides, Silicon, Etching, Polarization, Wave propagation, Refractive index, Solids

Read Abstract +

We review the use of the oxide cladding stress induced photoelastic effect to eliminate the modal birefringence in silicon-on-insulator (SOI) ridge waveguide components, and highlight characteristics particular to high index contrast (HIC) systems. The birefringence in planar waveguides has its origin in the electromagnetic boundary conditions at the waveguide boundaries, and can be further modified by the presence of stress in the materials. It is shown that geometrical constraints imposed by different design and fabrication considerations become increasingly difficult to satisfy with decreasing core sizes. On the other hand, with typical stress levels of -100 MPa to -400 MPa (compressive) in SiO₂ used as the upper cladding, the effective indices are altered up to the order of 10^-3 for ridges with heights ranging from 1 μm to 5 μm. We demonstrate that the stress can be effectively used to balance the geometrical birefringence. Birefringence-free operation is achieved for waveguides with otherwise large birefringence by using properly chosen thickness and stress of the upper cladding layer. This allows the waveguide cross-section profiles to be optimized for design criteria other than zero-birefringence. Since the index changes induced by the stress are orders of magnitude smaller than the waveguide core/cladding index contrast, changes in the mode profiles are insignificant and the associated mode mismatch loss is negligible. We study the stress-induced effects in two parallel waveguides of varying spacing, to emulate the condition in directional couplers and ring-resonators. In the arrayed waveguide grating (AWG) demultiplexers fabricated in the SOI platform, we demonstrated the reduction of the birefringence from 1.3x10^-3 (without the upper cladding) to below 1x10^-4 across the spectral band by using a 0.6 μm oxide upper cladding with a stress of -320 MPa (compressive). Design options for relaxed dimensional tolerance and improved coupler performance made available by using stress engineering are discussed.

Proceedings Article | 17 January 2005 Paper

Paper

A 100-channel near-infrared SOI waveguide microspectrometer: design and fabrication challenges

Pavel Cheben, Alexei Bogdanov, Andre Delage, Siegfried Janz, Boris Lamontagne, Marie-Josee Picard, Edith Post, Dan-Xia Xu

Proceedings Volume 5644, (2005) https://doi.org/10.1117/12.573895

KEYWORDS: Waveguides, Silicon, Sensors, Actuators, Spectral resolution, Optoelectronics, Etching, Optoelectronic devices, Environmental sensing, Biological and chemical sensing

Read Abstract +

Proceedings Article | 20 December 2004 Paper

Paper

Graded-index coupler for microphotonic SOI waveguides

Andre Delage, Siegfried Janz, Dan Xu, Dan Dalacu, Boris Lamontagne, Alexei Bogdanov

Proceedings Volume 5577, (2004) https://doi.org/10.1117/12.567264

KEYWORDS: Waveguides, GRIN lenses, Silicon, Plasma enhanced chemical vapor deposition, Optical components, Optical networks, Integrated optics, Photonics, Photonic crystal devices, Refractive index

Read Abstract +

Proceedings Article | 21 October 2004 Paper

Paper

A wavelength demultiplexer based on waveguide broadening in silicon-on-insulator platform

Oscar Martinez Matos, Maria Calvo, Pavel Cheben, Andre Delage, Siegfried Janz, Dan-Xia Xu

Proceedings Volume 5622, (2004) https://doi.org/10.1117/12.591553

KEYWORDS: Waveguides, Demultiplexers, Silicon, Dispersion, Radio propagation, Phase shifts, Wave propagation, Channel projecting optics, Signal attenuation, Numerical simulations

Read Abstract +

Proceedings Article | 1 July 2004 Paper

Paper

Stress-induced birefringence in silicon-on-insulator (SOI) waveguides

Winnie Ye, Dan-Xia Xu, Siegfried Janz, Pavel Cheben, Andre Delage, Marie-Josee Picard, Boris Lamontagne, N. Garry Tarr

Proceedings Volume 5357, (2004) https://doi.org/10.1117/12.529602

KEYWORDS: Waveguides, Birefringence, Cladding, Silicon, Oxides, Polarization, Etching, Photoelasticity, Demultiplexers, Tolerancing

Read Abstract +

Proceedings Article | 30 May 2003 Paper

Paper

Birefringence compensation in silicon-on-insulator planar waveguide demultiplexers using a buried oxide layer

Pavel Cheben, Dan-Xia Xu, Siegfried Janz, Andre Delage, Dan Dalacu

Proceedings Volume 4997, (2003) https://doi.org/10.1117/12.476661

KEYWORDS: Waveguides, Birefringence, Polarization, Amorphous silicon, Silicon, Demultiplexers, Oxides, Refractive index, Planar waveguides, Etching

Read Abstract +

The high index contrast of silicon-on-insulator (SOI) enables the scaling down of planar waveguide components into the microphotonic regime, but has the unwanted consequence of inducing a large TE-TM polarization birefringence. For ridge waveguides this birefringence can be reduced to an acceptable level by using appropriate ridge dimensions [1], but with decreasing Si thickness the required fabrication tolerances quickly become too narrow to implement this solution. Components with slab waveguide regions such as echelle grating demultiplexers cannot be made polarization independent using this method. An alternate approach is to introduce a polarization compensation region in the combiner section of an AWG or echelle grating to eliminate the polarization dependent wavelength shift[2]. In its original implementation, the compensator is fabricated by changing the local waveguide thickness. The resulting birefringence correction can be sensitive to errors in etch depth, and the mode mismatch between compensator and slab waveguide sections is a source of approximately 1 dB extra insertion loss (IL) for SOI demultiplexers with Si waveguide thickness in the range from 2 to 5 m. We describe a new compensator structure for the SOI platform using a buried low index layer, in this case SiO2 sandwiched between the Si waveguide layer and another Si cap layer. Such a silicon-oxide-silicon (SOS) compensator on SOI can eliminate the TE-TM wavelength shift of an SOI AWG or echelle grating demultiplexer without introducing a significant mode mismatch between the compensator and slab waveguide sections. A demultiplexer with an SOS compensator has almost 1 dB lower insertion loss of an equivalent device with an etched compensator. The SOS compensator is easily implemented using standard oxide and a-Si or polysilicon deposition techniques. In this paper we present calculations and experimental results on the effective birefringence compensation, PDL and IL of SOS compensators in SOI waveguide demultiplexers.

Proceedings Article | 21 April 2003 Paper

Paper

Scaling down photonic waveguide devices on the SOI platform

Pavel Cheben, Dan-Xia Xu, Siegfried Janz, Andre Delage

Proceedings Volume 5117, (2003) https://doi.org/10.1117/12.498795

KEYWORDS: Waveguides, Birefringence, Silicon, Polarization, Demultiplexers, Refractive index, Oxides, Etching, Dielectric polarization, Amorphous silicon

Read Abstract +

Proceedings Article | 18 May 2001 Paper

Paper

Novel waveguide MSM photodetectors on SOI substrates using silicides

Dan-Xia Xu, Siegfried Janz, Pavel Cheben, Andre Delage

Proceedings Volume 4293, (2001) https://doi.org/10.1117/12.426927

KEYWORDS: Silicon, Electrodes, Waveguides, Sensors, Photodetectors, Absorption, Quantum efficiency, Metals, Mirrors, Near infrared

Read Abstract +

Proceedings Article | 18 May 2001 Paper

Paper

Polarization compensation in silicon-on-insulator arrayed waveguide grating devices

Pavel Cheben, Andrew Bezinger, Andre Delage, Lynden Erickson, Siegfried Janz, Dan-Xia Xu

Proceedings Volume 4293, (2001) https://doi.org/10.1117/12.426939

KEYWORDS: Waveguides, Polarization, Etching, Demultiplexers, Silicon, Dispersion, Birefringence, Output couplers, Waveguide modes, Wavelength division multiplexing

Read Abstract +

Proceedings Article | 15 December 2000 Paper

Paper

Quasi-phase-matching using quantum-well-intermixing-induced modulation of the nonlinear susceptibility of asymmetric quantum wells

J.-P. Bouchard, Siegfried Janz, Dan-Xia Xu, Zbigniew Wasilewski, U. Akano, Ian Mitchell, Paul Piva, Michel Tetu

Proceedings Volume 4087, (2000) https://doi.org/10.1117/12.406458

KEYWORDS: Quantum wells, Waveguides, Modulation, Photomasks, Second-harmonic generation, Gold, Semiconducting wafers, Ions, Ion implantation, Phase shift keying

Read Abstract +

Proceedings Article | 15 March 2000 Paper

Paper

Arrayed waveguide grating demultiplexers in silicon-on-insulator

Matthew Pearson, Andrew Bezinger, Andre Delage, Jeffrey Fraser, Siegfried Janz, Paul Jessop, Dan-Xia Xu

Proceedings Volume 3953, (2000) https://doi.org/10.1117/12.379610

KEYWORDS: Waveguides, Birefringence, Silicon, Demultiplexers, Waveguide modes, Etching, Polarization, Reactive ion etching, Single mode fibers, Refractive index

Read Abstract +

Proceedings Article | 19 March 1999 Paper

Paper

Photodetectors for 1.3-um and 1.55-um wavelengths using SiGe undulating MQWs on SOI substrates

Dan-Xia Xu, Siegfried Janz, Hugues Lafontaine, Matthew Pearson

Proceedings Volume 3630, (1999) https://doi.org/10.1117/12.342801

KEYWORDS: Silicon, Quantum wells, Germanium, Waveguides, Photodetectors, Sensors, Absorption, Photonic integrated circuits, Chemical vapor deposition, Geometrical optics

Read Abstract +

Proceedings Article | 19 March 1999 Paper

Paper

Si/Si1-xGex waveguide components for WDM demultiplexing

Siegfried Janz, Dan-Xia Xu, Jean-Marc Baribeau, Andre Delage, Robin Williams

Proceedings Volume 3630, (1999) https://doi.org/10.1117/12.342798

KEYWORDS: Waveguides, Silicon, Demultiplexers, Wavelength division multiplexing, Semiconducting wafers, Germanium, Waveguide modes, Etching, Refractive index, Infrared cameras

Read Abstract +

Proceedings Article | 25 April 1997 Paper

Paper

Fabrication of Si/Si1-xGex waveguide WDM components

Dan-Xia Xu, Siegfried Janz, Robin Williams, Elizabeth Allegretto, Sylvain Mailhot, Jian Jun He, Jean-Marc Baribeau, Hugues Lafontaine, John Stapledon, Jeffrey Fraser, Mike Robillard, Paul Jessop, Stephen Kovacic

Proceedings Volume 3007, (1997) https://doi.org/10.1117/12.273852

KEYWORDS: Waveguides, Silicon, Germanium, Refractive index, Wavelength division multiplexing, Waveguide modes, Chemical vapor deposition, Semiconducting wafers, Scanning electron microscopy, Dielectrics

Read Abstract +

Proceedings Article | 1 August 1990 Paper

Paper

Current-voltage characteristics of MBE-grown strained Si1-xGex/Si heterojunction diodes and their temperature dependence

Dan-Xia Xu, Guangdi Shen, Magnus Willander, Goeran Hansson

Proceedings Volume 1288, (1990) https://doi.org/10.1117/12.20920

KEYWORDS: Diodes, Diffusion, Heterojunctions, Silicon, Temperature metrology, Germanium, Doping, High speed electronics, Semiconductors, Neodymium

Read Abstract +

Proceedings Article | 1 August 1990 Paper

Paper

Temperature characteristics of resonant-tunneling devices

Guangdi Shen, Dan-Xia Xu, Magnus Willander, Goeran Hansson

Proceedings Volume 1288, (1990) https://doi.org/10.1117/12.20916

KEYWORDS: High speed electronics, Resistance, Thulium, Doping, Quantum wells, Temperature metrology, Silver, Semiconductors, Heterojunctions, VHF band

Read Abstract +

Showing 5 of 82 publications

Conference Committee Involvement (39)

Integrated Photonics Platforms III

7 April 2024 | Strasbourg, France

Nanophotonics and Micro/Nano Optics IX

14 October 2023 | Beijing, China

Nanophotonics, Micro/Nano Optics, and Plasmonics VIII

5 December 2022 | Online Only, China

Integrated Photonics Platforms II

4 April 2022 | Strasbourg, France

Nanophotonics and Micro/Nano Optics VII

11 October 2021 | Nantong, JS, China

Nanophotonics and Micro/Nano Optics VI

12 October 2020 | Online Only, China

Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications

6 April 2020 | Online Only, France

Nanophotonics and Micro/Nano Optics V

21 October 2019 | Hangzhou, China

Nanophotonics and Micro/Nano Optics IV

12 October 2018 | Beijing, China

Silicon Photonics: from Fundamental Research to Manufacturing

23 April 2018 | Strasbourg, France

Integrated Photonics: Materials, Devices, and Applications IV

9 May 2017 | Barcelona, Spain

Integrated Optics: Physics and Simulations

24 April 2017 | Prague, Czech Republic

Silicon Photonics XII

30 January 2017 | San Francisco, California, United States

Nanophotonics and Micro/Nano Optics III

12 October 2016 | Beijing, China

Silicon Photonics and Photonic Integrated Circuits

3 April 2016 | Brussels, Belgium

Smart Photonic and Optoelectronic Integrated Circuits XVIII

16 February 2016 | San Francisco, California, United States

Silicon Photonics XI

15 February 2016 | San Francisco, California, United States

Integrated Photonics: Materials, Devices, and Applications III

4 May 2015 | Barcelona, Spain

Integrated Optics: Physics and Simulations

13 April 2015 | Prague, Czech Republic

Smart Photonic and Optoelectronic Integrated Circuits XVII

11 February 2015 | San Francisco, California, United States

Silicon Photonics X

9 February 2015 | San Francisco, California, United States

Nanophotonics and Micro/Nano Optics II

9 October 2014 | Beijing, China

Silicon Photonics and Photonic Integrated Circuits

14 April 2014 | Brussels, Belgium

Smart Photonic and Optoelectronic Integrated Circuits XVI

5 February 2014 | San Francisco, California, United States

Silicon Photonics IX

3 February 2014 | San Francisco, California, United States

Integrated Optics: Physics and Simulations

17 April 2013 | Prague, Czech Republic

Silicon Photonics VIII

4 February 2013 | San Francisco, California, United States

Nanophotonics and Micro/Nano Optics

5 November 2012 | Beijing, China

Silicon Photonics and Photonic Integrated Circuits

16 April 2012 | Brussels, Belgium

Silicon Photonics VII

22 January 2012 | San Francisco, California, United States

Silicon Photonics VI

23 January 2011 | San Francisco, California, United States

Silicon Photonics V

24 January 2010 | San Francisco, California, United States

Silicon Photonics IV

26 January 2009 | San Jose, California, United States

Silicon Photonics III

21 January 2008 | San Jose, California, United States

Silicon Photonics II

22 January 2007 | San Jose, California, United States

Silicon Photonics

25 January 2006 | San Jose, California, United States

Optoelectronic Integration on Silicon III

25 January 2005 | San Jose, California, United States

Optoelectronic Integration on Silicon II

27 January 2004 | San Jose, CA, United States

Optoelectronic Integration on Silicon

29 January 2003 | San Jose, CA, United States

Showing 5 of 39 Conference Committees

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