Prof. Dapeng Chen Profile

Prof. Dapeng Chen

Head of CMOS/MEMS Dept. at Institute of Microelectronics

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Author

Publications (6)

SPIE Journal Paper | 1 October 2008

Two microthermal shear stress sensors: surface micromachined and bulk-bonding micromachined

Shali Shi, Liang Yi, Dapeng Chen, Yi Ou, Yupeng Jing, Tianchun Ye, ZhongYu Cheng

JM3, Vol. 7, Issue 04, 043014, (October 2008) https://doi.org/10.1117/12.10.1117/1.3033207

KEYWORDS: Sensors, Silicon, Resistors, Etching, Resistance, Platinum, Titanium, Low pressure chemical vapor deposition, Infrared sensors, Temperature metrology

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Proceedings Article | 27 January 2005 Paper

Analysis of nanometer-isolated trench diffract aerial image of both conventional and second-generation synchrotron-based proximity x-ray lithography

Changqing Xie, Dapeng Chen, Ming Liu, Tianchun Ye, Futing Yi

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.573232

KEYWORDS: Tantalum, X-rays, Semiconducting wafers, X-ray lithography, Photomasks, X-ray imaging, Beam propagation method, X-ray diffraction, Image resolution, Silicon

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Proceedings Article | 27 January 2005 Paper

A new ZEP520/P(MMA-MAA)/ZEP520 trilayer process for T-shaped gate using synchrotron-based proximity x-ray lithography

Changqing Xie, Dapeng Chen, Jiebing Niu, Ming Liu, Tianchun Ye, Futing Yi, Liangqiang Peng

Proceedings Volume 5645, (2005) https://doi.org/10.1117/12.573519

KEYWORDS: Electron beam lithography, X-ray lithography, Photoresist processing, Lithography, Photomasks, Head, X-rays, Silicon, Polymethylmethacrylate, Semiconducting wafers

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Proceedings Article | 30 December 2004 Paper

Fabrication and application of a novel freestanding stencil bi-material cantilever structure

Weibing Wang, Dapeng Chen, Tianchun Ye, Liang Pan, Qingchuan Zhang, Xiaoping Wu

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.569916

KEYWORDS: Infrared imaging, Microelectromechanical systems, Thermography, Gold, Imaging systems, Silicon, Staring arrays, Scanning electron microscopy, Infrared radiation, Sensors

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Proceedings Article | 2 September 2003 Paper

Study on thermal control of x-ray mask during post-exposure bake

Yongkun Wang, Jianzu Yu, Lei Yu, Dapeng Chen

Proceedings Volume 5253, (2003) https://doi.org/10.1117/12.521406

KEYWORDS: Photomasks, X-rays, Silicon, 3D modeling, Convection, Critical dimension metrology, Thermal modeling, Temperature metrology, Finite element methods, Semiconducting wafers

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Proceedings Article | 15 August 1998 Paper

Manufacturing technology by synchrotron radiation in NSRL

Xinyi Zhang, Dapeng Chen, Yiguan Hu, Yangchao Tian, Shaojun Fu, Ya Kan, Andong Xia, Yilin Hong, Xiaoming Tao, Gang Liu

Proceedings Volume 3550, (1998) https://doi.org/10.1117/12.317908

KEYWORDS: Synchrotron radiation, Photomasks, Lithography, X-ray lithography, Sensors, Gold, Manufacturing, Fabrication, Synchrotron technology, Superconductors

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Showing 5 of 6 publications

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