Prof. Dapeng Chen
Head of CMOS/MEMS Dept. at Institute of Microelectronics
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | October 1, 2008
JM3 Vol. 7 Issue 04
KEYWORDS: Sensors, Silicon, Resistors, Etching, Resistance, Platinum, Titanium, Low pressure chemical vapor deposition, Infrared sensors, Temperature metrology

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Lithography, Electron beam lithography, Polymethylmethacrylate, X-rays, Silicon, Head, Photomasks, Photoresist processing, Semiconducting wafers, X-ray lithography

PROCEEDINGS ARTICLE | January 27, 2005
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: X-rays, X-ray diffraction, Silicon, Image resolution, Photomasks, Tantalum, X-ray imaging, Semiconducting wafers, X-ray lithography, Beam propagation method

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Staring arrays, Microelectromechanical systems, Gold, Thermography, Infrared imaging, Imaging systems, Sensors, Silicon, Scanning electron microscopy, Infrared radiation

PROCEEDINGS ARTICLE | September 2, 2003
Proc. SPIE. 5253, Fifth International Symposium on Instrumentation and Control Technology
KEYWORDS: X-rays, Silicon, 3D modeling, Finite element methods, Photomasks, Convection, Critical dimension metrology, Semiconducting wafers, Thermal modeling, Temperature metrology

PROCEEDINGS ARTICLE | August 15, 1998
Proc. SPIE. 3550, Laser Processing of Materials and Industrial Applications II
KEYWORDS: Fabrication, Gold, Lithography, Sensors, Manufacturing, Superconductors, Photomasks, Synchrotron radiation, X-ray lithography, Synchrotron technology

Showing 5 of 6 publications
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