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Daria Zaitseva
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Publications (1)
Proceedings Article | 27 November 2023 Poster + Paper
Thermochemical laser writing of chromium grayscale masks and their application for fabrication of multilevel diffractive optical elements
Roman Kuts, Victor Korolkov, Alexander Sametov, Vadim Cherkashin, Daria Zaitseva, Sergey Golubtsov
Proceedings Volume 12768, 1276829 (2023) https://doi.org/10.1117/12.2687589
KEYWORDS: Chromium, Photomasks, Photoresist materials, Transmittance, Diffractive optical elements, Film thickness, Fabrication, Diffraction, Laser applications, Grayscale lithography
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