Dr. Dario Gil
SPIE Involvement:
Publications (9)

Proceedings Article | 14 March 2019 Open Access Presentation
Proceedings Volume 10957, 1095702 (2019) https://doi.org/10.1117/12.2523971

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72741E (2009) https://doi.org/10.1117/12.814251
KEYWORDS: Wavefronts, Holograms, Electromagnetism, Near field, Lithography, Optical design, Photomasks, Diffraction gratings, Optical lithography, Spatial frequencies

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72740C (2009) https://doi.org/10.1117/12.814305
KEYWORDS: Diffraction, Printing, Source mask optimization, Optical lithography, Resolution enhancement technologies, Photomasks, Semiconducting wafers, Lithographic illumination, Lithography, Manufacturing

Proceedings Article | 1 April 2008 Paper
Proceedings Volume 6924, 69243C (2008) https://doi.org/10.1117/12.784107
KEYWORDS: Photomasks, Double patterning technology, Logic, Lithography, Etching, Optical lithography, Optical proximity correction, Immersion lithography, Printing, Image processing

Proceedings Article | 29 March 2006 Paper
G. Wallraff, C. Larson, G. Breyta, L. Sundberg, D. Miller, D. Gil, K. Petrillo, W. Pierson
Proceedings Volume 6153, 61531M (2006) https://doi.org/10.1117/12.657179
KEYWORDS: Semiconducting wafers, Immersion lithography, Particles, Silicon, Rhodamine, Photoresist materials, Digital watermarking, Video, Image processing, Solids

Showing 5 of 9 publications
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