Dr. Dario Gil
at
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Publications (8)

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Optical design, Holograms, Optical lithography, Spatial frequencies, Wavefronts, Near field, Photomasks, Electromagnetism, Diffraction gratings

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Diffraction, Optical lithography, Lithographic illumination, Manufacturing, Printing, Photomasks, Source mask optimization, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | April 1, 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Image processing, Printing, Photomasks, Double patterning technology, Immersion lithography, Optical proximity correction

PROCEEDINGS ARTICLE | March 29, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Image processing, Video, Particles, Silicon, Digital watermarking, Photoresist materials, Solids, Immersion lithography, Semiconducting wafers, Rhodamine

PROCEEDINGS ARTICLE | March 22, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Semiconductors, Nanotechnology, Lithography, Water, Scanners, Photoresist materials, Immersion lithography, Thin film coatings, Semiconducting wafers, Photoresist developing

PROCEEDINGS ARTICLE | March 9, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Lithography, Optical lithography, Scanners, Manufacturing, Monte Carlo methods, Photomasks, Immersion lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

Showing 5 of 8 publications
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