Dr. Dario Gil
at
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 14 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Diffraction, Optical lithography, Lithographic illumination, Manufacturing, Printing, Photomasks, Source mask optimization, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 16 March 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Lithography, Optical design, Holograms, Optical lithography, Spatial frequencies, Wavefronts, Near field, Photomasks, Electromagnetism, Diffraction gratings

Proceedings Article | 1 April 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Image processing, Printing, Photomasks, Double patterning technology, Immersion lithography, Optical proximity correction

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Image processing, Video, Particles, Silicon, Digital watermarking, Photoresist materials, Solids, Immersion lithography, Semiconducting wafers, Rhodamine

Proceedings Article | 22 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Semiconductors, Nanotechnology, Lithography, Water, Scanners, Photoresist materials, Immersion lithography, Thin film coatings, Semiconducting wafers, Photoresist developing

Showing 5 of 9 publications
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