Dr. Dario L. Goldfarb
Research Staff Member at IBM Thomas J Watson Research Ctr
SPIE Involvement:
Conference Program Committee | Author
Publications (48)

SPIE Journal Paper | 19 September 2022
Dario Goldfarb, Scott Lewis, Richard Grindell, Grigore Timco, Richard E. Winpenny
JM3, Vol. 21, Issue 04, 041406, (September 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.4.041406
KEYWORDS: Semiconducting wafers, Extreme ultraviolet, Photoresist processing, Extreme ultraviolet lithography, Electron beams, Silicon, Electron beam lithography, Etching, Chromium, Nickel

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11609, 116090P (2021) https://doi.org/10.1117/12.2583566
KEYWORDS: Extreme ultraviolet lithography, Roads, Extreme ultraviolet, Optical lithography, Yield improvement, Transistors, Printing, Modulation, Metals, Materials processing

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11326, 1132609 (2020) https://doi.org/10.1117/12.2551967
KEYWORDS: Extreme ultraviolet, Polymers, Extreme ultraviolet lithography, Ions, Optical lithography, Stochastic processes, Data modeling, Interfaces, Solids, Systems modeling

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11323, 113230P (2020) https://doi.org/10.1117/12.2551612
KEYWORDS: Scanners, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers, Carbon, Contamination, Calibration, Sensors, Extreme ultraviolet

Proceedings Article | 16 October 2019 Presentation
Proceedings Volume 11147, 1114718 (2019) https://doi.org/10.1117/12.2539037
KEYWORDS: Stochastic processes, Modulation, Extreme ultraviolet lithography, Optical lithography, Image resolution, Photomasks, Etching, Extreme ultraviolet, Line edge roughness

Showing 5 of 48 publications
Conference Committee Involvement (3)
Advances in Patterning Materials and Processes XLII
23 February 2025 | San Jose, California, United States
Advances in Patterning Materials and Processes XLI
26 February 2024 | San Jose, California, United States
Advances in Patterning Materials and Processes XL
27 February 2023 | San Jose, California, United States
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