Dr. Darren A. Alman
at Univ of Illinois
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | January 18, 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Contamination, Tin, Ruthenium, Mirrors, Extreme ultraviolet lithography, Gold, Molybdenum, Sputter deposition, Silicon, Ions

SPIE Journal Paper | January 1, 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Ions, Molybdenum, Mirrors, Gold, Silicon, Extreme ultraviolet, Ruthenium, Extreme ultraviolet lithography, Multilayers, Sputter deposition

SPIE Journal Paper | July 1, 2006
JM3 Vol. 5 Issue 03
KEYWORDS: Contamination, Molybdenum, Tin, Mirrors, Reflectivity, Gold, Sputter deposition, Ions, Ruthenium, Plasma

SPIE Journal Paper | July 1, 2006
JM3 Vol. 5 Issue 03
KEYWORDS: Molybdenum, Silicon, Ions, Gold, Xenon, Plasma, Ruthenium, Palladium, Mirrors, Extreme ultraviolet lithography

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Plasmas, Ions, Xenon, Extreme ultraviolet, Electrons, Hydrogen, Extreme ultraviolet lithography, Prisms, Diagnostics, Lithography

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Plasma, Ions, Extreme ultraviolet, Black bodies, Copper, X-rays, Xenon, Tin, X-ray microscopy, Laser energy

Showing 5 of 11 publications
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