Dr. Darren A. Alman
at Univ of Illinois
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 18 January 2007
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Gold, Mirrors, Contamination, Sputter deposition, Ions, Silicon, Extreme ultraviolet lithography, Molybdenum, Ruthenium, Tin

SPIE Journal Paper | 1 January 2007
JM3 Vol. 6 Issue 01
KEYWORDS: Ions, Molybdenum, Mirrors, Gold, Silicon, Extreme ultraviolet, Ruthenium, Extreme ultraviolet lithography, Multilayers, Sputter deposition

SPIE Journal Paper | 1 July 2006
JM3 Vol. 5 Issue 03
KEYWORDS: Contamination, Molybdenum, Tin, Mirrors, Reflectivity, Gold, Sputter deposition, Ions, Ruthenium, Plasma

SPIE Journal Paper | 1 July 2006
JM3 Vol. 5 Issue 03
KEYWORDS: Molybdenum, Silicon, Ions, Gold, Xenon, Plasma, Ruthenium, Palladium, Mirrors, Extreme ultraviolet lithography

Proceedings Article | 24 March 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Lithography, Prisms, Electrons, Ions, Hydrogen, Plasmas, Diagnostics, Xenon, Extreme ultraviolet, Extreme ultraviolet lithography

Showing 5 of 11 publications
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