Dr. Darren L. Forman
Principal Scientist at Nutronics, Inc.
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 12 March 2019
JM3 Vol. 18 Issue 01
KEYWORDS: Photoresist materials, Line edge roughness, Optical lithography, Lithography, Diffraction, Nanoimprint lithography, Photoresist developing, Electron beam lithography, Deep ultraviolet, Near field optics

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Point spread functions, Super resolution, Modulation, Cameras, Ultraviolet radiation, Relays, Optical alignment, Bragg cells, Camera shutters

Proceedings Article | 8 February 2012
Proc. SPIE. 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
KEYWORDS: Lithography, FT-IR spectroscopy, Super resolution, Polymers, Ultraviolet radiation, Photoresist materials, Polymerization, Photochemistry, Stimulated emission depletion microscopy, Absorption

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Semiconductors, Diffraction, Metrology, Polarization, Etching, Light scattering, Scatterometry, Measurement devices, Analytical research, Critical dimension metrology

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Semiconductors, Diffraction, Polarization, Silicon, Clouds, Atomic force microscopy, Scatterometry, Domes, Critical dimension metrology, Scatter measurement

Showing 5 of 8 publications
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