Darren Taylor
Reseacher Staff Engineer at Photronics Inc
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Author
Publications (30)

Proceedings Article | 20 October 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Lithography, Diffraction, Polarization, Manufacturing, Photomasks, Electron beam melting, Nanoimprint lithography, Semiconducting wafers, Binary data, Resolution enhancement technologies

Proceedings Article | 19 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Signal to noise ratio, Lithography, Electron beams, Etching, Molecules, Ions, Image resolution, Scanning electron microscopy, Ion beams, Photomasks

Proceedings Article | 5 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Phase shifting, Etching, Manufacturing, Inspection, Computer simulations, Photomasks, Semiconducting wafers, Binary data

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Etching, Quartz, Manufacturing, Inspection, Scanning electron microscopy, Software development, Photomasks, Binary data, Phase shifts

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Reticles, Defect detection, Modulation, Databases, Manufacturing, Inspection, Image quality, Photomasks, Defect inspection

Showing 5 of 30 publications
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