Based on the processing mechanism of double-sided polishing machine and working mode, conducted intensive research, found that the motion state of the disc and pads can be simplified as a workpiece relative motion, and a complete mathematical model is built for the motion state of any point on the polishing disc. In view of the relationship among the workpiece’s motion characteristics, polishing process parameters and polishing effect, the computer is used to simulate the motion of the polishing disc relative to the workpiece in the state of steady motion. Taking the motion parameters as the control factor, by changing the ratio of different parameters, the different trajectory of the workpiece’s relative motion is obtained, and the regular pattern of the value of each factor on the motion trajectory distribution is explored. Finally, a set of parameters with the best grinding track uniformity and polishing effect were obtained through analysis and summary.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.