Dr. D. Bruce Burckel
at Sandia National Labs
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | August 12, 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Silicon, Transistors, Integrated circuits, Metals, Capacitance, Spine, Semiconducting wafers, Etching, Lithography, Optical lithography

PROCEEDINGS ARTICLE | March 21, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, 3D imaging standards, Etching, Dry etching, Metals, Dielectrics, Silicon, Capacitance, Ion implantation, Transistors, Field effect transistors, Plasma etching, Spine, Semiconducting wafers

PROCEEDINGS ARTICLE | September 3, 2015
Proc. SPIE. 9552, Carbon Nanotubes, Graphene, and Emerging 2D Materials for Electronic and Photonic Devices VIII
KEYWORDS: Carbon, Graphene, Sputter deposition, Metals, Nickel, Coating, Interferometry, Transition metals, Photoresist materials, Photoresist developing

PROCEEDINGS ARTICLE | September 11, 2013
Proc. SPIE. 8806, Metamaterials: Fundamentals and Applications VI
KEYWORDS: Gold, Metamaterials, Polymethylmethacrylate, Polymers, Image processing, Ions, Silicon, Scanning electron microscopy, Failure analysis, Projection lithography

PROCEEDINGS ARTICLE | September 11, 2013
Proc. SPIE. 8806, Metamaterials: Fundamentals and Applications VI
KEYWORDS: Thermography, Metamaterials, Finite-difference time-domain method, Scattering, Silicon, 3D modeling, Transmittance, Infrared radiation, Antennas, Absorption

PROCEEDINGS ARTICLE | May 11, 2012
Proc. SPIE. 8356, Technologies for Synthetic Environments: Hardware-in-the-Loop XVII
KEYWORDS: Mid-IR, Diffractive optical elements, Cameras, Sensors, Tungsten, Photonic crystals, Projection systems, Infrared signatures, Infrared technology, Semiconducting wafers

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top