Dr. David B. Burckel
at Sandia National Labs
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 4 March 2019
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Microelectromechanical systems, Metamaterials, Lithography, Electron beam lithography, Etching, Polymers, Silicon, Scanning electron microscopy, Projection lithography, Chemical mechanical planarization

Proceedings Article | 19 September 2018
Proc. SPIE. 10719, Metamaterials, Metadevices, and Metasystems 2018
KEYWORDS: Finite-difference time-domain method, Data modeling, Polarization, Scattering, Silicon, Magnetism, 3D modeling, Split ring resonators, Optical arrays, Optical metamaterials

Proceedings Article | 17 September 2018
Proc. SPIE. 10719, Metamaterials, Metadevices, and Metasystems 2018
KEYWORDS: Plasmonics, 3D acquisition, Dielectrics, Interfaces, Magnetism, Wavefronts, 3D modeling, Antennas, Chemical elements, Light-matter interactions

SPIE Journal Paper | 12 August 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Silicon, Transistors, Integrated circuits, Metals, Capacitance, Spine, Semiconducting wafers, Etching, Lithography, Optical lithography

Proceedings Article | 21 March 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Lithography, Optical lithography, 3D imaging standards, Etching, Dry etching, Metals, Dielectrics, Silicon, Capacitance, Ion implantation, Transistors, Field effect transistors, Plasma etching, Spine, Semiconducting wafers

Showing 5 of 14 publications
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