Dr. David S. Fryer
Product Engineer at Siemens EDA
SPIE Involvement:
Publications (19)

Proceedings Article | 13 June 2022 Presentation + Paper
Proceedings Volume 12052, 120520Q (2022) https://doi.org/10.1117/12.2614118
KEYWORDS: Optimization (mathematics), Calibration, Data modeling, Optical proximity correction, Binary data, Performance modeling, Genetic algorithms, Process modeling, Computer simulations, Precision calibration

Proceedings Article | 22 February 2021 Paper
Proceedings Volume 11613, 116130H (2021) https://doi.org/10.1117/12.2584771
KEYWORDS: SRAF, 3D modeling, Printing, Data modeling, 3D printing

Proceedings Article | 20 October 2016 Paper
Proceedings Volume 10032, 100320N (2016) https://doi.org/10.1117/12.2249680
KEYWORDS: Optical proximity correction, Semiconducting wafers, Data modeling, Refractive index, Calibration, Statistical modeling, Photomasks, Process modeling, Lithography, Monte Carlo methods

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 97800I (2016) https://doi.org/10.1117/12.2219707
KEYWORDS: Data modeling, Optical proximity correction, Bayesian inference, Lithography, 3D modeling, Calibration, Metrology

SPIE Journal Paper | 16 February 2016
JM3, Vol. 15, Issue 02, 021204, (February 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.2.021204
KEYWORDS: 3D modeling, Photomasks, Near field, Electromagnetism, Lithography, Semiconducting wafers, Scattering, Lithographic illumination, Diffraction, Critical dimension metrology

Showing 5 of 19 publications
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