Mr. David Girbau
Engineer at UPC
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 24, 2004
Proc. SPIE. 5344, MEMS/MOEMS Components and Their Applications
KEYWORDS: Microelectromechanical systems, Actuators, Capacitors, Electrodes, Metals, Digital filtering, Photography, Manufacturing, Capacitance, Polysomnography

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