Dr. David B. Graves
at Princeton Plasma Physics Lab
SPIE Involvement:
Publications (8)

Proceedings Article | 22 February 2021 Presentation
Proceedings Volume 11615, 116150I (2021) https://doi.org/10.1117/12.2587120
KEYWORDS: Plasma, Manufacturing, Thin films, Semiconductors, Quantum communications, Thin film manufacturing, Thin film devices, Silicon, Quantum information, Integrated circuits

Proceedings Article | 23 March 2016 Paper
Stephen Sirard, Laurent Azarnouche, Emir Gurer, William Durand, Michael Maher, Kazunori Mori, Gregory Blachut, Dustin Janes, Yusuke Asano, Yasunobu Someya, Diane Hymes, David Graves, Christopher Ellison, C. Grant Willson
Proceedings Volume 9782, 97820K (2016) https://doi.org/10.1117/12.2220305
KEYWORDS: Plasma, Polymers, Etching, Silicon, Optical lithography, Plasma etching, Tin, FT-IR spectroscopy, Directed self assembly, Reactive ion etching, Picosecond phenomena, Polymethylmethacrylate

Proceedings Article | 6 November 2009 Paper
Michael Grimbergen, D. G. Nest, Keven Yu, T. Y. Leung, Madhavi Chandrachood, Alan Ouye, Saravjeet Singh, Ibrahim Ibrahim, Ajay Kumar, David Graves
Proceedings Volume 7488, 74880L (2009) https://doi.org/10.1117/12.833490
KEYWORDS: Plasma, Ions, Etching, Electrodes, Argon, Chlorine, Plasma etching, Emission spectroscopy, Ceramics, Ultraviolet radiation

Proceedings Article | 28 March 2007 Open Access Paper
Andy Neureuther, Wojtek Poppe, Juliet Holwill, Eric Chin, Lynn Wang, Jae-Seok Yang, Marshal Miller, Dan Ceperley, Chris Clifford, Koji Kikuchi, Jihong Choi, Dave Dornfeld, Paul Friedberg, Costas Spanos, John Hoang, Jane Chang, Jerry Hsu, David Graves, Alan Wu, Mike Lieberman
Proceedings Volume 6521, 652104 (2007) https://doi.org/10.1117/12.721199
KEYWORDS: Design for manufacturing, Photomasks, Device simulation, Computer aided design, Process modeling, Etching, Monochromatic aberrations, Manufacturing, Lithography, Chemical mechanical planarization

Proceedings Article | 16 April 1993 Paper
David Graves, Han-Ming Wu, Robert Porteous
Proceedings Volume 1803, (1993) https://doi.org/10.1117/12.142910
KEYWORDS: Electrons, Ions, Plasma, Magnetism, Ionization, Microwave radiation, Picosecond phenomena, Particles, Throat, Velocity measurements

Showing 5 of 8 publications
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