Dr. David Kuo
Senior Director/Technologist at Seagate Technology LLC
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Optical lithography, Etching, Polymers, Oxygen, Directed self assembly, Plasma etching, Picosecond phenomena, Nanoimprint lithography, Reactive ion etching, Plasma

SPIE Journal Paper | August 12, 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Servomechanisms, Beam propagation method, Scanning electron microscopy, Quartz, Magnetism, Nanoimprint lithography, Etching, Optical lithography, Lithography, Directed self assembly

SPIE Journal Paper | August 2, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Spherical lenses, Magnetism, Picosecond phenomena, Servomechanisms, Quartz, Beam propagation method, Lithography, Nanoimprint lithography, Reactive ion etching, Directed self assembly

SPIE Journal Paper | September 13, 2012
JM3 Vol. 11 Issue 3
KEYWORDS: Scanning probe microscopy, Beam propagation method, Contamination, Scanning electron microscopy, Silica, Inspection, Nanoimprint lithography, Hydrogen, Particles, Critical dimension metrology

PROCEEDINGS ARTICLE | March 21, 2012
Proc. SPIE. 8323, Alternative Lithographic Technologies IV
KEYWORDS: Contamination, Silica, Particles, Inspection, Image analysis, Scanning electron microscopy, Nanoimprint lithography, Scanning probe microscopy, Critical dimension metrology, Beam propagation method

PROCEEDINGS ARTICLE | September 23, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Metrology, Quartz, Image processing, Image analysis, Scanning electron microscopy, Transmission electron microscopy, Monte Carlo methods, Line width roughness, Critical dimension metrology, Process modeling

Showing 5 of 6 publications
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