Dr. David P. Mancini
Process Engineer at Motorola Inc
SPIE Involvement:
Author
Publications (21)

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Oxides, Lithography, Deep ultraviolet, Etching, Quartz, Inspection, Atomic force microscopy, Scanning electron microscopy, Photomasks, Semiconducting wafers

Proceedings Article | 2 June 2004 Paper
Proc. SPIE. 5504, 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents
KEYWORDS: Nanotechnology, Lithography, Electron beam lithography, Etching, Image processing, Chromium, Photomasks, Beam shaping, Photoresist processing, Semiconducting wafers

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Oxides, Lithography, Etching, Quartz, Silicon, Scanning electron microscopy, Printing, Photomasks, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Etching, Ultraviolet radiation, Molecules, Scanning electron microscopy, Monte Carlo methods, Finite element methods, Polymerization, Molecular interactions

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, Etching, Mercury, Manufacturing, Lamps, Scanning electron microscopy, Nanoimprint lithography, Optical alignment, Semiconducting wafers, Overlay metrology

Showing 5 of 21 publications
Conference Committee Involvement (2)
Emerging Lithographic Technologies VIII
24 February 2004 | Santa Clara, California, United States
Emerging Lithographic Technologies VII
25 February 2003 | Santa Clara, California, United States
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