Dr. David C. Ng
at National ICT Australia
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 7 December 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Oxides, Thin films, Silica, Quartz, Silicon, Atomic force microscopy, Silicon films, Photomasks, Semiconducting wafers, Camera shutters

Proceedings Article | 7 December 2013
Proc. SPIE. 8923, Micro/Nano Materials, Devices, and Systems
KEYWORDS: Optical components, Reflectors, Etching, Dry etching, Silicon, Photomasks, Deep reactive ion etching, Wet etching, Semiconducting wafers, System on a chip

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