Mr. David Nguyen
Phd Student at Ecole Polytechnique Federale de Lausanne
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | August 18, 2014
Proc. SPIE. 9203, Interferometry XVII: Techniques and Analysis
KEYWORDS: Lithography, Microscopes, Beam splitters, Lithographic illumination, Printing, Objectives, Photomasks, Optical proximity correction, Structural design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Silicon, Photoresist materials, Photomasks, Critical dimension metrology, Molybdenum, Tolerancing, Photoresist developing

SPIE Journal Paper | September 24, 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Solids, Lenses, Photonics, Micro optics, Microelectromechanical systems, Photonic devices, Computer engineering

SPIE Journal Paper | June 12, 2013
JM3 Vol. 12 Issue 02
KEYWORDS: Solids, Nanolithography, Lenses, Spherical lenses, Polymethylmethacrylate, Lithography, Electron beam lithography, Silicon, Microscopes, Objectives

PROCEEDINGS ARTICLE | March 5, 2013
Proc. SPIE. 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI
KEYWORDS: Lithography, Microscopes, Electron beam lithography, Polymethylmethacrylate, Lenses, Silicon, Solids, 3D metrology, Spherical lenses, Nanolithography

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