As deep ultra-violet (DUV) wavelength optical systems progress towards higher numerical aperture (NA), at least some
of the lens surfaces in the system approach almost complete hemispherical shape and some of the lens surfaces have very
high angle of incidence (AOI) requirements. The antireflection (AR) coating designs for such lens surfaces must address
intensity apodization due to coating thickness nonuniformity and polarization purity. We present some of the recent
results in the area of DUV coatings that highlight these challenges and demonstrate production capability.