Mr. David Ruiz
at Univ de Castilla-La Mancha
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 30, 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Fabrication, Actuators, Microsystems, Polarization, Sensors, Electrodes, Silicon, Manufacturing, 3D modeling, Solids, Finite element methods, Aluminum nitride, Modeling and simulation

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Actuators, Polarization, Sensors, Electrodes, Manufacturing, Transducers, Computer aided design, Neodymium, Electromechanical design

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