David Ruiz
at Univ de Castilla-La Mancha
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 May 2017
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Actuators, Manufacturing, Microsystems, Polarization, Fabrication, Silicon, Modeling and simulation, Electrodes, Solids, Finite element methods, Aluminum nitride, 3D modeling, Sensors

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Sensors, Electrodes, Actuators, Computer aided design, Transducers, Manufacturing, Polarization, Neodymium, Electromechanical design, Microelectromechanical systems

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