David Schäfer
at RheinAhrCampus Remagen
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 2 April 2011
Proc. SPIE. 7985, 27th European Mask and Lithography Conference
KEYWORDS: Photomasks, Extreme ultraviolet, Metrology, Inspection, Extreme ultraviolet lithography, Reflectometry, Reflectivity, Multilayers, Pulsed laser operation, Defect inspection

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Zone plates, Silicon, Free electron lasers, Optical filters, Microscopes, Polymethylmethacrylate, Zirconium, Aluminum, Absorption, Nickel

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Optical filters, Plasma, Nitrogen, Bioalcohols, X-rays, X-ray optics, Aluminum, Laser induced plasma spectroscopy, Vanadium, Light scattering

Proceedings Article | 29 August 2006
Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications
KEYWORDS: Microscopes, Zone plates, X-rays, Plasma, Titanium, Extreme ultraviolet, X-ray microscopy, Laser induced plasma spectroscopy, Imaging spectroscopy, Nitrogen

Proceedings Article | 29 August 2006
Proc. SPIE. 6317, Advances in X-Ray/EUV Optics, Components, and Applications
KEYWORDS: Wavefronts, Wavefront sensors, Sensors, Crystals, X-rays, Scintillators, Extreme ultraviolet, Cameras, Imaging systems, Visible radiation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top