Dr. David C. Shaver
Division Head at MIT Lincoln Lab
SPIE Involvement:
Publications (6)

Proceedings Article | 13 May 2011 Paper
Proc. SPIE. 8033, Advanced Photon Counting Techniques V
KEYWORDS: Avalanche photodetectors, Sensors, Ultraviolet radiation, Photons, Silicon, Quantum efficiency, Reflectivity, Avalanche photodiodes, Semiconducting wafers, Wafer bonding

Proceedings Article | 19 May 2005 Paper
Proc. SPIE. 5791, Laser Radar Technology and Applications X
KEYWORDS: Readout integrated circuits, Avalanche photodetectors, Microlens array, LIDAR, Sensors, Photons, Silicon, Quantum efficiency, Detector development, Semiconducting wafers

Proceedings Article | 1 June 1992 Paper
Proc. SPIE. 1674, Optical/Laser Microlithography V
KEYWORDS: Lithography, Microscopes, Optical lithography, Interferometers, Sensors, Lens design, Photomasks, Excimer lasers, Optical alignment, Semiconducting wafers

Proceedings Article | 1 December 1991 Paper
Proc. SPIE. 1596, Metallization: Performance and Reliability Issues for VLSI and ULSI
KEYWORDS: Metals, Laser applications, Platinum, Laser ablation, Ion beams, Aluminum, Excimer lasers, Laser cutting, Deposition processes, Pulsed laser operation

Proceedings Article | 1 June 1991 Paper
Proc. SPIE. 1466, Advances in Resist Technology and Processing VIII
KEYWORDS: Lithography, Etching, Polymers, Image processing, Ultraviolet radiation, Silicon, Oxygen, Reactive ion etching, Semiconducting wafers, Plasma

Showing 5 of 6 publications
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