Mr. David Ure
Founder & Executive Director at Irresistible Materials Ltd
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Optical lithography, Contamination, Metals, Molecules, Ions, Manufacturing, Photoresist materials, Extreme ultraviolet lithography, High volume manufacturing, Line edge roughness

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