David Veyrié
at Ctr National d'Études Spatiales
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 February 2010
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Helium, NOx, Microelectromechanical systems, FT-IR spectroscopy, Absorption, Spectroscopy, Infrared spectroscopy, Optical testing, Silicon, Packaging

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Absorption, Coating, Silicon, Semiconducting wafers, Microelectromechanical systems, FT-IR spectroscopy, Infrared spectroscopy, Infrared radiation, Nitrous oxide, Spectroscopy

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