Dr. Davide Dattilo
at Süss MicroTec Photomask Equipment GmbH & Co KG
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 3 October 2018
Proc. SPIE. 10810, Photomask Technology 2018
KEYWORDS: Reticles, Visualization, Polymers, Particles, Chemistry, Inspection, Optical inspection, Pellicles, Photomasks, Scanning probe microscopy

Proceedings Article | 20 October 2016
Proc. SPIE. 10032, 32nd European Mask and Lithography Conference
KEYWORDS: Particles, Photons, Chemistry, Transducers, Photomasks, Extreme ultraviolet, Cavitation, Acoustics, Sonoluminescence, Acoustic cavitation

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Metals, Ions, Silicon, Oxygen, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Ozone, Ruthenium, Oxidation

Proceedings Article | 23 October 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Carbon, Particles, Pellicles, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Scanning probe microscopy, Ruthenium, Mask cleaning, Industrial chemicals

Proceedings Article | 28 July 2014
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Air contamination, Image processing, Ultraviolet radiation, Ions, Oxygen, Photomasks, Cavitation, Neodymium, Ozone, Photoresist processing

Showing 5 of 8 publications
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