Fiber optic gyroscope is a completely static, pure optical gyroscope, with a high resolution and other advantages. In order
to make the Fiber optic gyroscope be smaller in size, more reliable and sensitive, this paper presents a new type of
interference integrated optical chip, which is X-cut and Y-propagation LiNbO3 substrate with the dimensions of
38mm×6mm× 2mm. We research and design Double-Y branching guide, phase modulator and polarizers of Integrated
Optical Chip in FOG. Double-Y branching waveguide, phase modulator and polarizers were integrated in a chip, on
which sensing element, resource (SLD), electrophotonic detector (PIN) and signal demodulation circuit are
hybrid-Integrated together, then we get an acceleration FOG of high resolution. We test the chip with input light and find
that diffraction image of output light from the double-Y branching waveguide is well symmetric, which indicates that the
double-Y branching waveguide is 3dB beam-splitting, to overcome deficiencies of fiber coupler of splicing type and
dual-melting conical. Exciting signal is coherent with the output signal of the FOG, and the performances of the FOG
meets design requirement.
A kind of photo-electronic integrated acceleration seismic detecting technology, which is novel and precise based on
waveguide M-Z interference, is presented. It provieds modern geologic prospect with a novel detection technology. The
principle of the photo-electronic integrated acceleration seismic geophone is introduced in this paper. The core of the
photo-electronic integrated acceleration is the silicon harmonic oscillator, which is supported by four silicon beams and
integrated on the signal beam of the M-Z interferometer. When the seismic mass is subjected to a normal acceleration
a<sub>z</sub>, the acceleration a<sub>z</sub>, will result in an inertial force F<sub>z</sub>, causing the mass to move up or down like the piston, until the
counter force of the beam suspension equals this inertial force. The principle of the harmonic oscillator is briefly
introduced, the factors influencing the anisotropic etching quality of the harmonic oscillator are analyzed in detail. In
experiment, the fabrication technology was studied and improved. The high quality harmonic oscillator has been
successfully fabricated. It has been applied in the integrated optical chip of "the theory and experiment research of
photoelectric integrated acceleration seismic geophone technology".
For simultaneously detecting multi-parameters of blood in the clinical diagnosis, the analysis apparatus should be smaller
in size, more reliable and sensitive. So a kind of integrated bio-sensor for blood analysis based on Micro Total Analysis
System (μTAS) is presented. It provides modern bio-sensor prospect with a novel technology.
A multi-parameters of blood analysis integration sensor is μTAS bio-sensor based on 4 groups of interdigital array (IDA)microelectrodes. The IDA microelectrodes are fabricated on glass substrates by photography, film deposition and
other microfabrication techniques. Thin-film gold microelectrode with a thickness of 250nm is deposited on a chromium-adhesion
layer. The finger microelectrode width and space are both 10μm. The work space is 2×2cm<sup>2</sup>. The concentration
of Blood sugar, Total Cholesterol, Acetone body and Lactic acid is measured by detecting steady-state limiting
currents in IDA microelectrodes modified with enzymes on the "generate-collect" mode. Blood distribution structure is
designed and fabricated, to distribute blood and isolate reaction areas. By contrasting two kinds of process flow based on
lift-off and etching, etching is adopted to preparation method of microelectrode.
A multi-channel apparatus for current measurement is accompleted. The system characteristics of the bio-sensor are
tested. The curve of the apparatus time to current response is achieved by testing on real-time. The relationships between
parameter concentration and current are analyzed in detail. The experimental data indicates: current measurement
dimension 0~40μA, certainty of measurement 0.1μA, the performances of the bio-sensor meets design requirement.
For high resolution application in seismic detection, the geophone should be smaller in size, more reliable and sensitive.
So a kind of photo-electronic integrated acceleration seismic detecting technology, which is novel and precise based on
waveguide M-Z interference, is presented. The principle of the photo-electronic integrated acceleration seismic geophone
is introduced in this paper. The seismometer is composed of a waveguide M-Z interferometer, a sensing element, a
modulation LD and signal processing system. The silicon crystal is adopted as the substrate. The core of the photoelectronic
integrated acceleration is the silicon harmonic oscillator, which is supported by four silicon beams and
integrated on the signal beam of the M-Z interferometer . The harmonic oscillator translates the acceleration information
of the external vibrational signal into phase variation of optical signal in the sensing arm, which is converted into optical
signal by M-Z interferometer, then PIN converts the optical signal into electric signal to process by the signal processing.
The experimental curve of seismometer frequency response is achieved.
Hybrid-integrated Optical acceleration seismometer and its digital signal processing system are researched and developed. The simple system figure of the seismometer is given. The principle of the seismometer is explicated. The seismometer is composed of a seismic mass,Integrated Optical Chips and a set of Michelson interferometer light path. The Michelson Integrated Optical Chips are critical parts among the sensor elements. The simple figure of the digital signal processing system is given. As an advanced quality digital signal processing (DSP) chip equipped with necessary circuits has been used in its digital signal processing system, a high accurate detection of the acceleration signal has been achieved and the environmental interference signal has been effectively compensated. Test results indicate that the accelerometer has better frequency response well above the resonant frequency, and the output signal is in correspondence with the input signal. The accelerometer also has better frequency response under the resonant frequency. At last, the curve of Seismometer frequency response is given.